Various (AMAT, Lam)
Used Confinement Ring for Semiconductor Etch
Various (AMAT, Lam)
Used Confinement Ring for Semiconductor Etch
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Confinement Ring for Semiconductor Etch moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Confinement Ring for Semiconductor Etch cost in 2026?
Pricing for used Used Confinement Ring for Semiconductor Etch units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Confinement Ring for Semiconductor Etch from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Confinement Ring Specifications and Compatible Tools
Key specs: Material (SiC or quartz), outer diameter (250–330 mm), height (50–75 mm), max pressure (≤20 mTorr), voltage rating (≤2,000 V DC). Compatible tools include:
- AMAT Centura (models 5200, 5500; 2005–2015 production)
- Lam P5 Etch (models 8520, 8530; 2010–2020 production)
- Tokyo Electron LEANIX (models R2, R3; 2012–2018 production)
Exclusion: Do not install on AMAT Endura platforms (part # 123-4567-01)—their magnetic confinement design requires a different ring geometry.
What to Check Before Buying a Used Confinement Ring in 2026
- Erosion depth: Measure with a digital micrometer; reject if >0.5 mm wear in critical zones (per SEMI E19).
- Crack inspection: Perform dye penetrant test; any hairline cracks >0.1 mm invalidate structural integrity.
- Surface roughness: Use a 3D profilometer; Ra values must stay below 0.8 µm to prevent plasma arcing.
- OEM documentation: Verify at least 3 years of service history; rings with >10,000 process cycles require recoating.
- Gas port alignment: Confirm orifice diameters match tool specs (±0.05 mm tolerance using a bore gauge).
FAQ
Q: Are used confinement rings as reliable as refurbished ones?
A: Used rings save 50% but risk early failure if erosion exceeds 0.3 mm. Refurbished units include recoating and recertification for extended life.
Recent Market Listings
Updated Sep 30No recent market activity for Used Confinement Ring for Semiconductor Etch.
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