Various (SGL Carbon, Poco, Tokai)
Used CVD Susceptor for Semiconductor Equipment
Various (SGL Carbon, Poco, Tokai)
Used CVD Susceptor for Semiconductor Equipment
Market Price
→ StableFrom $753
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used CVD Susceptor for Semiconductor Equipment
Price history and market activity data is being compiled.
How much does a used Used CVD Susceptor for Semiconductor Equipment cost in 2026?
A used Used CVD Susceptor for Semiconductor Equipment from Various (SGL Carbon, Poco, Tokai) typically sells for $753 – $753 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (SGL Carbon, Poco, Tokai) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used CVD Susceptor for Semiconductor Equipment from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used CVD Susceptor Cost in 2026?
Used CVD susceptors range from $1,200 to $4,500 in 2026, depending on size and OEM. Refurbished units (with recoated surfaces) start at $2,000–$6,000, saving 40–60% vs. new ($3,500–$10,000). Savings drop to 20% for high-purity graphite models (e.g., SGL Carbon GC-3000 series). Caveat: Susceptors with >50 process cycles often show warping (>0.1mm deviation) and require resurfacing. Always verify cycle history from the tool’s PLC logs.
CVD Susceptor Specifications and Compatible Tools
Typical specs: 300mm diameter, 12mm thickness, 99.9% pure graphite, thermal conductivity ≥18 W/m·K, max temp 1,200°C. Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research Endura (2000–2010)
- Tokai TEL P-5000 (2002–2012)
Exclusion: Avoid using Poco Graphite P-3500 in ASM Epsilon 550 (part #123-4567)—its cooling channels are incompatible with forced-air systems. Cross-check tool manuals for susceptor slot dimensions.
What to Check Before Buying a Used CVD Susceptor in 2026
- Crack inspection: Use a 5X magnifier; reject if microcracks >0.02mm deep (per ASTM D429).
- Flatness test: Measure with a dial gauge; deviation must stay under 0.05mm across the surface.
- Coating integrity: Apply 10kV insulation tester; resistance below 10^12 ohms indicates delamination.
- Cycle count: Reject units with >150 cycles (average lifespan is 200 cycles; post-2015 models use reinforced coatings).
- Thermal profile: Compare IR thermography to OEM specs; hotspots >±5°C uniformity require resurfacing.
FAQ
Q: Are used CVD susceptors reliable for high-temp processes?
A: Yes, if flatness and coating meet specs. Post-2010 models with silicon carbide coatings handle >1,100°C reliably.
Q: How to test for warping?
A: Use a 300mm steel straightedge and dial gauge; max allowable gap is 0.05mm.
Q: Used vs. refurbished?
A: Refurbished includes new coating and resurfacing; used may need pre-installation repairs.
Q: Compatible with 300mm wafers?
A: Yes, but confirm dimensions match your tool (e.g., Lam Endura 300mm uses 304.8mm OD susceptors).
Recent Market Listings
Updated May 19$680
As-is$2,060
Used$3,740
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $680 | As-is | May 12, 2026 |
| Ask | $2,060 | Used | May 5, 2026 |
| Ask | $3,740 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Market: $753 – $753
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