✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Various (SGL Carbon, Poco, Tokai)

Used CVD Susceptor for Semiconductor Equipment

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Various (SGL Carbon, Poco, Tokai)

Used CVD Susceptor for Semiconductor Equipment

Name: Used CVD Susceptor for Semiconductor Equipment
Brand: Various (SGL Carbon, Poco, Tokai)

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used CVD Susceptor for Semiconductor Equipment moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used CVD Susceptor for Semiconductor Equipment cost in 2026?

Pricing for used Used CVD Susceptor for Semiconductor Equipment units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (SGL Carbon, Poco, Tokai) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used CVD Susceptor for Semiconductor Equipment from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

CVD Susceptor Specifications and Compatible Tools

Typical specs: 300mm diameter, 12mm thickness, 99.9% pure graphite, thermal conductivity ≥18 W/m·K, max temp 1,200°C. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2010)
Tokai TEL P-5000 (2002–2012)
Exclusion: Avoid using Poco Graphite P-3500 in ASM Epsilon 550 (part #123-4567)—its cooling channels are incompatible with forced-air systems. Cross-check tool manuals for susceptor slot dimensions.

What to Check Before Buying a Used CVD Susceptor in 2026

Crack inspection: Use a 5X magnifier; reject if microcracks >0.02mm deep (per ASTM D429).
Flatness test: Measure with a dial gauge; deviation must stay under 0.05mm across the surface.
Coating integrity: Apply 10kV insulation tester; resistance below 10^12 ohms indicates delamination.
Cycle count: Reject units with >150 cycles (average lifespan is 200 cycles; post-2015 models use reinforced coatings).
Thermal profile: Compare IR thermography to OEM specs; hotspots >±5°C uniformity require resurfacing.

FAQ

Q: Are used CVD susceptors reliable for high-temp processes?
A: Yes, if flatness and coating meet specs. Post-2010 models with silicon carbide coatings handle >1,100°C reliably.

Q: How to test for warping?
A: Use a 300mm steel straightedge and dial gauge; max allowable gap is 0.05mm.

Q: Used vs. refurbished?
A: Refurbished includes new coating and resurfacing; used may need pre-installation repairs.

Q: Compatible with 300mm wafers?
A: Yes, but confirm dimensions match your tool (e.g., Lam Endura 300mm uses 304.8mm OD susceptors).