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Various (SGL Carbon, Poco, Tokai)

Used CVD Susceptor for Semiconductor Equipment

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Various (SGL Carbon, Poco, Tokai)

Used CVD Susceptor for Semiconductor Equipment

Market Price

→ Stable
2 active listings

From $753

Typical secondary market pricing · USD

Low $753Avg $753High $753

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request
Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Used CVD Susceptor for Semiconductor Equipment cost in 2026?

A used Used CVD Susceptor for Semiconductor Equipment from Various (SGL Carbon, Poco, Tokai) typically sells for $753 – $753 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (SGL Carbon, Poco, Tokai) Consumables vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2–6 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used CVD Susceptor for Semiconductor Equipment from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2–6 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used CVD Susceptor Cost in 2026?

Used CVD susceptors range from $1,200 to $4,500 in 2026, depending on size and OEM. Refurbished units (with recoated surfaces) start at $2,000–$6,000, saving 40–60% vs. new ($3,500–$10,000). Savings drop to 20% for high-purity graphite models (e.g., SGL Carbon GC-3000 series). Caveat: Susceptors with >50 process cycles often show warping (>0.1mm deviation) and require resurfacing. Always verify cycle history from the tool’s PLC logs.

CVD Susceptor Specifications and Compatible Tools

Typical specs: 300mm diameter, 12mm thickness, 99.9% pure graphite, thermal conductivity ≥18 W/m·K, max temp 1,200°C. Compatible with:

  • Applied Materials Centura (1998–2005)
  • Lam Research Endura (2000–2010)
  • Tokai TEL P-5000 (2002–2012)
    Exclusion: Avoid using Poco Graphite P-3500 in ASM Epsilon 550 (part #123-4567)—its cooling channels are incompatible with forced-air systems. Cross-check tool manuals for susceptor slot dimensions.

What to Check Before Buying a Used CVD Susceptor in 2026

  1. Crack inspection: Use a 5X magnifier; reject if microcracks >0.02mm deep (per ASTM D429).
  2. Flatness test: Measure with a dial gauge; deviation must stay under 0.05mm across the surface.
  3. Coating integrity: Apply 10kV insulation tester; resistance below 10^12 ohms indicates delamination.
  4. Cycle count: Reject units with >150 cycles (average lifespan is 200 cycles; post-2015 models use reinforced coatings).
  5. Thermal profile: Compare IR thermography to OEM specs; hotspots >±5°C uniformity require resurfacing.

FAQ

Q: Are used CVD susceptors reliable for high-temp processes?
A: Yes, if flatness and coating meet specs. Post-2010 models with silicon carbide coatings handle >1,100°C reliably.

Q: How to test for warping?
A: Use a 300mm steel straightedge and dial gauge; max allowable gap is 0.05mm.

Q: Used vs. refurbished?
A: Refurbished includes new coating and resurfacing; used may need pre-installation repairs.

Q: Compatible with 300mm wafers?
A: Yes, but confirm dimensions match your tool (e.g., Lam Endura 300mm uses 304.8mm OD susceptors).

Recent Market Listings

Updated May 19
AskMay 12, 2026

$680

As-is
AskMay 5, 2026

$2,060

Used
AskApr 28, 2026

$3,740

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
CategoryConsumables

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Market: $753 – $753

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