Various (SGL Carbon, Poco, Tokai)
Used Graphite Susceptor for CVD/Epi
Various (SGL Carbon, Poco, Tokai)
Used Graphite Susceptor for CVD/Epi
Market Price
→ StableFrom $701
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Graphite Susceptor for CVD/Epi
Price history and market activity data is being compiled.
How much does a used Used Graphite Susceptor for CVD/Epi cost in 2026?
A used Used Graphite Susceptor for CVD/Epi from Various (SGL Carbon, Poco, Tokai) typically sells for $701 – $701 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (SGL Carbon, Poco, Tokai) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Graphite Susceptor for CVD/Epi from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Graphite Susceptor Cost in 2026?
In 2026, used graphite susceptors for CVD/Epi range from $1,200 to $8,000, depending on size, purity grade, and cycle history. Refurbished units (with recarburization and surface polishing) fall between $3,000 and $12,000. These prices represent 40–60% savings vs. new OEM parts (which exceed $20,000 for 300mm-grade models). Caveat: Susceptors with >500 thermal cycles show >15% degradation in thermal uniformity, per SEMI E142-0815 standards. Always request cycle logs and contamination reports.
Graphite Susceptor Specifications and Compatible Tools
Key specs: Thermal conductivity 18–22 W/m·K, max operating temp 1200°C, purity ≥99.95% (ISO 1837:2020). Common dimensions: 200–300mm diameter, 50–80mm thickness. Compatible tools include:
- Lam Research Centura CVD (1998–2005)
- Applied Materials Reflexion Epi (2001–2008)
- ASM EpiCenter 300 (1999–2006)
Exclusion: Not compatible with Axcelis XE-1200 (part #123-4567-89) due to mismatched RF coupling geometry. Verify tool-specific RF frequency (13.56MHz vs 2MHz variants).
What to Check Before Buying a Used Graphite Susceptor in 2026
- Crack inspection: Use ultrasonic testing (UT) to detect subsurface fractures >0.2mm. Reject if >3 cracks in active heating zone.
- Thermal conductivity: Measure via laser flash analysis (ASTM E1461-17). Accept only values ≥18 W/m·K.
- Surface roughness: Profile with a 3D stylus instrument. Reject if Ra exceeds 0.8µm (per SEMI F27-0803).
- Contamination: Run XPS for oxygen/carbon ratio. Reject if O/C >0.05% (indicates graphitization failure).
- Cycle history: Verify thermal cycling logs. Susceptors >800 cycles show accelerated graphitization cracks.
FAQ
Q: Used vs. refurbished graphite susceptors—what’s the difference?
A: Used parts are resold as-is; refurbished units undergo recarburization, resurfacing, and requalification. Refurbished parts have lower long-term contamination risk.
Q: How to test a used susceptor for thermal uniformity?
A: Perform an IR thermography scan at 1100°C. Accept only ±2°C deviation across the active surface.
Q: Are these compatible with 300mm wafer tools?
A
Recent Market Listings
Updated May 19$680
As-is$2,060
Used$3,740
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $680 | As-is | May 12, 2026 |
| Ask | $2,060 | Used | May 5, 2026 |
| Ask | $3,740 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $701 – $701
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