Various
Used Focus Ring / Edge Ring
Various
Used Focus Ring / Edge Ring
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Used Focus Ring / Edge Ring moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Focus Ring / Edge Ring cost in 2026?
Pricing for used Used Focus Ring / Edge Ring units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Focus Ring / Edge Ring from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Focus Ring / Edge Ring Specifications and Compatible Tools
Key specs: Diameter 200–300mm, thickness 15–25mm, thermal stability up to 400°C, and dielectric strength >10kV/mm (quartz variants). Compatible with:
- Lam Research Centura DSiE (2012–2018)
- Applied Materials Reflexion P5000 (2014–2020)
- Tokyo Electron FlexLine HDP-CVD (2015–2021)
Exclusion: Avoid using Part # AM-ER-330B (Applied Materials) in Centura platforms—mismatched curvature causes edge plasma collapse. Verify tool OEM drawings before installation.
What to Check Before Buying a Used Focus Ring / Edge Ring in 2026
- Surface integrity: Use a digital microscope (10–50x) to confirm no cracks >50µm or pitting >3µm depth.
- Dimensional tolerance: Measure with a 5-digit caliper; reject parts with >0.05mm deviation from nominal ID/OD.
- Contamination levels: Run an EDX analysis for metallic residues (e.g., tungsten, aluminum); concentrations >5ppm risk chamber contamination.
- Lifecycle data: Request wafer-run history—parts with >15k cycles may exhibit hidden delamination.
- Plasma test: Perform a 10-minute ICP test at 1,300W (13.56MHz) to check for arcing or uneven sheath formation.
FAQ
Q: Can I use a quartz Focus Ring on a metal-plasma tool?
A: No—quartz degrades rapidly in high-density metal plasmas. Use ceramic or aluminum-nitride variants instead.
Q: How to differentiate between Focus Ring and Edge Ring?
A: Focus Rings adjust plasma uniformity (installed under wafer), while Edge Rings dampen edge effects (mounted outside the wafer perimeter).
Q: Are 200mm rings compatible with 300mm tools?
A: Only if the tool’s chuck has adjustable clamping zones. Otherwise, scaling causes plasma instability.
Q: What’s the ROI for refurbishing vs replacing?
A: Choose based on wear severity.
Recent Market Listings
Updated Sep 30No recent market activity for Used Focus Ring / Edge Ring.
Submit a bid to get notified when sellers list this part.
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Quick Info
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