Used Mass Flow Controller for Argon (Ar)

Name: Used Mass Flow Controller for Argon (Ar)
Brand: MKS/Brooks/Horiba
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Mass Flow Controller for Argon (Ar) cost in 2026?

A used Used Mass Flow Controller for Argon (Ar) from MKS/Brooks/Horiba typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS/Brooks/Horiba Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Mass Flow Controller for Argon (Ar) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Mass Flow Controller for Argon Cost in 2026?

Used units from MKS, Brooks, or Horiba range from $632–$3,320, depending on flow capacity and calibration history. Refurbished models (certified <12 months old) start at $1,200, while untested used parts drop to $632–$950. New OEM equivalents cost $5,000–$10,000, offering 67–87% savings with used options. Critical caveat: parts from tools decommissioned before 2018 often lack modern digital compensation for Ar’s 39.948 g/mol molecular weight, requiring manual recalibration. Always verify the controller’s max flow rating (typically 0–100 sccm for Ar applications) matches your tool’s specifications.

Mass Flow Controller Specifications and Compatible Tools

Key specs: ±1% accuracy, <100ms response time, 12–24V DC, and 4–20mA output. Compatible with:

Applied Materials Centura (2000–2015)
Lam Research Endura (2005–2018)
ASM AMAT P500 (2010–2020)
Exclusion warning: Do not use Horiba MFCs (PN H-45A) with Veeco Turanis V (PN 789-1234); incompatible pressure ranges cause Ar flow instability above 80 sccm. Ensure the part’s pressure tolerance (typically 0–50 psig) aligns with your process.

What to Check Before Buying a Used Mass Flow Controller in 2026

Calibration certificate: Must be dated within 12 months; reject units older than 18 months.
Diaphragm wear: Measure deformation with a micrometer—reject if >5% deviation from OEM specs.
Leak test: Use a mass spectrometer; Ar leakage >1 sccm invalidates the part.
Electrical continuity: Test with a multimeter; resistance >0.5 ohms at 24V DC indicates degraded circuitry.
Usage hours: Units >10,000 hours require full rebuild; most used parts exceed this threshold.