Used Mass Flow Controller for Oxygen (O2)

Name: Used Mass Flow Controller for Oxygen (O2)
Brand: MKS/Brooks/Horiba
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Mass Flow Controller for Oxygen (O2)

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Used Mass Flow Controller for Oxygen (O2) cost in 2026?

A used Used Mass Flow Controller for Oxygen (O2) from MKS/Brooks/Horiba typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS/Brooks/Horiba Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Mass Flow Controller for Oxygen (O2) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Mass Flow Controller for Oxygen (O2) Cost in 2026?

Used units priced $632–$3,320 in 2026, depending on calibration history and OEM. Refurbished models (e.g., Brooks 585R-O2) average $2,100–$3,320, while non-refurbished used parts (MKS 264A-O2) range $632–$1,450. New equivalents from Horiba cost $4,500–$6,800, offering 58–72% savings with used/refurbished options. Critical caveat: O2-specific MFCs with >5 years of continuous operation show 22% higher drift rates (±2.1% vs ±1.3% accuracy) due to sensor degradation. Always verify calibration certificates post-2023 for parts over 8 years old.

Mass Flow Controller Specifications and Compatible Tools

Key specs: 0–100 sccm flow range, ±1% accuracy (±0.5% for Horiba models), 12–24V DC, 4–20mA output. Compatible with:

Applied Materials Centura CVD (1998–2005)
Lam Research Endura P5E (2000–2008)
ASM AMAT P5000 Etch (2003–2010)
Exclusion: Not compatible with Lam Edge E500 (Part #LAM-E500-MFC1) due to incompatible digital signal protocol (requires Brooks 5860i adapter). Verify tool’s gas manifold input type (analog vs. digital) before purchase. O2-specific models use stainless-steel wetted parts; avoid generic N2/MFCs for oxygen to prevent sensor poisoning.

What to Check Before Buying a Used Mass Flow Controller in 2026

Corrosion in wetted parts: Use a borescope to inspect O2 inlet/nozzle. Reject if pitting >50µm or surface roughness >Ra 0.8µm.
Response time: Test with a flow bench; units >500ms lag time (vs spec of 350ms) are non-compliant.
Calibration drift: Validate with a dry O2 gas standard (99.999% purity). Deviation >±1.5% at 50 sccm invalidates accuracy.
Electronics lifecycle: Check firmware date code. Units with pre-201