Used Mass Flow Controller for Silane (SiH4)

Name: Used Mass Flow Controller for Silane (SiH4)
Brand: MKS/Brooks/Horiba
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Mass Flow Controller for Silane (SiH4) cost in 2026?

A used Used Mass Flow Controller for Silane (SiH4) from MKS/Brooks/Horiba typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS/Brooks/Horiba Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Mass Flow Controller for Silane (SiH4) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Mass Flow Controller for Silane Cost in 2026?

In 2026, used mass flow controllers (MFCs) for silane (SiH4) range from $632 to $3,320, depending on OEM, condition, and calibration history. Refurbished units (with replaced diaphragms and sensors) typically fall between $1,200–$3,320, while non-refurbished used parts start at $632–$1,950. Compared to new MFCs (priced ~$8,000–$12,000), used/refurbished options save 70–90%. However, units with >8 years of service life often require immediate diaphragm replacement (~$450–$700), reducing net savings. Always verify the part’s last calibration date—controllers not serviced in 3+ years may fail accuracy tests at >5% deviation, voiding cost benefits.

Mass Flow Controller Specifications and Compatible Tools

SiH4 MFCs operate at 0–100 sccm flow range, ±1% accuracy, 0–25 psi inlet pressure, and 24V DC power. Key models include MKS 1179B (2001–2010), Brooks 5850S (1999–2008), and Horiba FMA-300 (2003–2012). Compatible tools: Applied Materials Centura Cluster Tool (1998–2005), Lam Research Endura P5000 (2000–2008), and ASM EpiCore 200 (1999–2006). Warning: Do not install in Tokyo Electron Lambda 820 systems (part no. TEL-L820-FC-03) without a pulsation damper—high-frequency gas oscillations exceed the MFC’s 4–20 mA signal stability threshold.

What to Check Before Buying a Used Mass Flow Controller in 2026

Diaphragm wear: Use a profilometer to measure thickness. Reject if <50 microns (original spec: 75–90 microns).
Zero-flow drift: Test with a multimeter at 20°C. Accept only units with <0.5% baseline deviation over 10 minutes.
O-ring integrity: Inspect for cracks >3mm or hardening (Shore A hardness >85). Replace if used in