Used Mass Flow Controller for Silane (SiH4)

Name: Used Mass Flow Controller for Silane (SiH4)
Brand: MKS/Brooks/Horiba

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Mass Flow Controller for Silane (SiH4) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Mass Flow Controller for Silane (SiH4) cost in 2026?

Pricing for used Used Mass Flow Controller for Silane (SiH4) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS/Brooks/Horiba Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Mass Flow Controller for Silane (SiH4) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Mass Flow Controller Specifications and Compatible Tools

SiH4 MFCs operate at 0–100 sccm flow range, ±1% accuracy, 0–25 psi inlet pressure, and 24V DC power. Key models include MKS 1179B (2001–2010), Brooks 5850S (1999–2008), and Horiba FMA-300 (2003–2012). Compatible tools: Applied Materials Centura Cluster Tool (1998–2005), Lam Research Endura P5000 (2000–2008), and ASM EpiCore 200 (1999–2006). Warning: Do not install in Tokyo Electron Lambda 820 systems (part no. TEL-L820-FC-03) without a pulsation damper—high-frequency gas oscillations exceed the MFC’s 4–20 mA signal stability threshold.

What to Check Before Buying a Used Mass Flow Controller in 2026

Diaphragm wear: Use a profilometer to measure thickness. Reject if <50 microns (original spec: 75–90 microns).
Zero-flow drift: Test with a multimeter at 20°C. Accept only units with <0.5% baseline deviation over 10 minutes.
O-ring integrity: Inspect for cracks >3mm or hardening (Shore A hardness >85). Replace if used in