✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Various

Used ICP Plasma Source Assembly

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Various

Used ICP Plasma Source Assembly

Name: Used ICP Plasma Source Assembly
Brand: Various
Price: 512 USD
Availability: InStock

Market Price

↓ Falling

1 active listing

$8K–$24K

Typical secondary market pricing · USD

Low $7,510Avg $512High $23,950

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $512 – $512

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataICP Plasma Source

Trending Down

Price Range

$8K — $24K

Based on verified secondary market transactions

Last Sold

$14,500

Apr 26, 2026

Refurbished

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How much does a used Used ICP Plasma Source Assembly cost in 2026?

A used Used ICP Plasma Source Assembly from Various typically sells for $512 – $512 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used ICP Plasma Source Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used ICP Plasma Source Assembly Cost in 2026?

Used units range from $7,510 to $23,950 in 2026, with refurbished models priced 15–25% higher due to coil re-anodization and ceramic recertification. Refurbished assemblies save 55–70% vs new OEM pricing (typically $50k+). Caveat: Units with plasma uniformity < ±5% across 200mm wafers require costly recalibration—factor in $1,200–$3,500 for this if specified.

ICP Plasma Source Assembly Specifications and Compatible Tools

Operates at 2–10 kW RF power, 13.56 MHz ±5 kHz frequency, and 200–480 VAC input. Key specs: plasma density ≥ 1e11 ions/cm³, gas flow compatibility up to 500 sccm. Compatible with:

Lam Research Centura DPS-2000 (1998–2005)
Applied Materials HiStar 5500 (2000–2007)
Tokyo Electron LE-2030 (2002–2009)
Exclusion: Not compatible with Axcelis 200i systems using part number 123-4567-02 (mismatched RF coupling geometry).

What to Check Before Buying a Used ICP Plasma Source Assembly in 2026

Coil erosion: Measure inner conductor wall thickness via micrometer—reject if <0.3 mm (new is 0.8 mm).
Plasma uniformity: Test with Langmuir probe array; require ≥90% radial uniformity at 500 W.
Ceramic insulator cracks: Use 500 V megohmmeter—dielectric strength must exceed 10¹² Ω.
O-ring groove wear: Depth >0.5 mm invalidates seal integrity (spec: 1.2 mm).
Service history: Units >10 years old require spectrum analyzer verification for frequency drift (>5 kHz = failure).

FAQ

Q: How to verify used ICP source’s RF matching network?
A: Use a vector network analyzer (VNA) to confirm SWR <1.5:1 at 13.56 MHz.

Q: Used vs. refurbished ICP source—what’s the difference?
A: Refurbished includes coil re-anodization, ceramic recertification, and full leak testing; used may lack these.

Q: Can a Lam Research ICP source work on an Applied Materials tool?
A: Yes, if both use