Used ICP Plasma Source Assembly

Name: Used ICP Plasma Source Assembly
Brand: Various

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used ICP Plasma Source Assembly moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used ICP Plasma Source Assembly cost in 2026?

Pricing for used Used ICP Plasma Source Assembly units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used ICP Plasma Source Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

ICP Plasma Source Assembly Specifications and Compatible Tools

Operates at 2–10 kW RF power, 13.56 MHz ±5 kHz frequency, and 200–480 VAC input. Key specs: plasma density ≥ 1e11 ions/cm³, gas flow compatibility up to 500 sccm. Compatible with:

Lam Research Centura DPS-2000 (1998–2005)
Applied Materials HiStar 5500 (2000–2007)
Tokyo Electron LE-2030 (2002–2009)
Exclusion: Not compatible with Axcelis 200i systems using part number 123-4567-02 (mismatched RF coupling geometry).

What to Check Before Buying a Used ICP Plasma Source Assembly in 2026

Coil erosion: Measure inner conductor wall thickness via micrometer—reject if <0.3 mm (new is 0.8 mm).
Plasma uniformity: Test with Langmuir probe array; require ≥90% radial uniformity at 500 W.
Ceramic insulator cracks: Use 500 V megohmmeter—dielectric strength must exceed 10¹² Ω.
O-ring groove wear: Depth >0.5 mm invalidates seal integrity (spec: 1.2 mm).
Service history: Units >10 years old require spectrum analyzer verification for frequency drift (>5 kHz = failure).

FAQ

Q: How to verify used ICP source’s RF matching network?
A: Use a vector network analyzer (VNA) to confirm SWR <1.5:1 at 13.56 MHz.

Q: Used vs. refurbished ICP source—what’s the difference?
A: Refurbished includes coil re-anodization, ceramic recertification, and full leak testing; used may lack these.

Q: Can a Lam Research ICP source work on an Applied Materials tool?
A: Yes, if both use