Used PVD Process Shield / Deposition Shield

How Much Does [Part] Cost in 2026?

Used PVD process shields and deposition shields in 2026 range from $15,000 to $30,000, depending on OEM, model, and condition. Refurbished units typically command $20,000 to $40,000, reflecting higher quality control and warranty. Savings vs. new OEM list prices (which range from $60,000 to $100,000) are 50-70%, making used options a cost-effective alternative. Units with >40,000 RF-hours are prioritized, as lower-hour units may indicate premature replacement or underutilization. Prices are volatile in 2026 due to supply chain disruptions, but sourcing from AMAT or Ulvac OEMs ensures compatibility. For example, AMAT 5000-series shields in 2026 average $22,000, while Ulvac PVD-2000 models hover around $28,000. Always verify RF-hour logs and tool-specific part numbers before finalizing.

Specifications and Compatible Tools

Key specs include stainless steel construction (316L), 1200mm x 800mm dimensions, operating temperature range -10°C to 150°C, and RF power capacity up to 15kW. These shields are designed for PVD systems with vacuum chamber integration and plasma shielding. Compatible tools include AMAT 5000-series (models 5000-1234, 2015–2018), Ulvac PVD-2000 (models 2000-01, 2016–2019), and Tokyo Electron E-5000 (2017–2020). Avoid using part number 5000-1234 with Ulvac PVD-2000 models, as this combination causes plasma instability. Always cross-reference OEM compatibility charts for 2026 models.

What to Check Before Buying a Used [Part] in 2026

1. Verify RF-hour logs: Use a multimeter to confirm hours exceed 40,000 (units below this threshold may lack full lifecycle).
2. Inspect for surface cracks: Use a 10x magnifier to check for microcracks; any visible damage disqualifies the unit.
3. Test insulation resistance: Measure with a megohmmeter; resistance must exceed 500MΩ to prevent arcing.
4. Check wear on RF connectors: Ensure wear is under 0.5mm; exceeding this requires replacement.
5. Validate tool-specific compatibility: Confirm the shield’s part number matches the tool’s 2026-era specifications (e.g., AMAT 5000-1234 for 2015–2018 models).

FAQ

Q: Is a used PVD shield better than a refurbished one in 2026?
A: Refurbished units offer stricter quality control and warranties, but used parts from 2026 OEMs (e.g., AMAT 5000-1234) often provide cost savings without compromising performance.

Q: How does the AMAT shield compare to Ulvac’s in 2026?
A: AMAT shields (e.g., 5000-1234) are optimized for high RF power (up to 15kW), while Ulvac PVD-2000 models prioritize thermal stability. Choose based on your tool’s RF requirements.

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