Used PVD Process Shield / Deposition Shield

Name: Used PVD Process Shield / Deposition Shield
Brand: Various (AMAT, Ulvac)

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used PVD Process Shield / Deposition Shield moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used PVD Process Shield / Deposition Shield cost in 2026?

Pricing for used Used PVD Process Shield / Deposition Shield units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Ulvac) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used PVD Process Shield / Deposition Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs include stainless steel construction (316L), 1200mm x 800mm dimensions, operating temperature range -10°C to 150°C, and RF power capacity up to 15kW. These shields are designed for PVD systems with vacuum chamber integration and plasma shielding. Compatible tools include AMAT 5000-series (models 5000-1234, 2015–2018), Ulvac PVD-2000 (models 2000-01, 2016–2019), and Tokyo Electron E-5000 (2017–2020). Avoid using part number 5000-1234 with Ulvac PVD-2000 models, as this combination causes plasma instability. Always cross-reference OEM compatibility charts for 2026 models.

What to Check Before Buying a Used [Part] in 2026

Verify RF-hour logs: Use a multimeter to confirm hours exceed 40,000 (units below this threshold may lack full lifecycle).
Inspect for surface cracks: Use a 10x magnifier to check for microcracks; any visible damage disqualifies the unit.
Test insulation resistance: Measure with a megohmmeter; resistance must exceed 500MΩ to prevent arcing.
Check wear on RF connectors: Ensure wear is under 0.5mm; exceeding this requires replacement.
Validate tool-specific compatibility: Confirm the shield’s part number matches the tool’s 2026-era specifications (e.g., AMAT 5000-1234 for 2015–2018 models).

FAQ

Q: Is a used PVD shield better than a refurbished one in 2026?
A: Refurbished units offer stricter quality control and warranties, but used parts from 2026 OEMs (e.g., AMAT 5000-1234) often provide cost savings without compromising performance.

Q: How does the AMAT shield compare to Ulvac’s in 2026?
A: AMAT shields (e.g., 5000-1234) are optimized for high RF power (up to 15kW), while Ulvac PVD-2000 models prioritize thermal stability. Choose based on your tool’s RF requirements.