Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al)

Name: Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al)
Brand: Various (AMAT, Ulvac)

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) cost in 2026?

Pricing for used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Ulvac) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Sputtering Target Specifications and Compatible Tools

Key specs:

Power Handling: 2–8 kW (Ti/Al), 3–12 kW (Ta/Cu)
Purity: 99.99% (Ti, Al), 99.95% (Ta), 99.999% (Cu)
Voltage/Frequency: 13.56 MHz RF, 400–600 V DC bias
Compatible tools:
AMAT Endura P5000 (2008–2014), Centura DXZ (2005–2012)
Ulvac TDM-5000 (2010–2016), TDM-C4 (2013–2018)
Exclusion: Avoid pairing Cu targets (part #CU-9001) with AMAT’s legacy HDP-CVD systems—thermal expansion mismatches cause delamination above 300°C.

What to Check Before Buying a Used Sputtering Target in 2026

Erosion Depth: Use a laser profilometer to confirm remaining thickness ≥85% of OEM spec. Reject if >20% of surface shows macro-pitting.
Backing Plate Integrity: Inspect for cracks via 10X magnifier; check thermal conductivity (should exceed 180 W/m·K with a CTD-300 tester).
Purity Verification: Run EDXRF spectroscopy to confirm no contamination >50 ppm (