Various (AMAT, Ulvac)
Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al)
Various (AMAT, Ulvac)
Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al)
Market Price
↓ Falling$2K–$8K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$2K — $8K
Based on verified secondary market transactions
Last Sold
$2,800
May 6, 2026
As-IsHow much does a used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) cost in 2026?
A used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) from Various (AMAT, Ulvac) typically sells for $2k – $8k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (AMAT, Ulvac) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al) Cost in 2026?
Used targets (Ti, 99.99% purity; Ta, 99.95%+) range from $1,200–$4,500 in 2026, depending on material and size. Refurbished units with recoated backing plates add $800–$1,500 to the base price. Savings vs new: 45–65% for Ti/Al, 35–50% for Ta/Cu. Caveat: Targets with >15% erosion of original thickness (measured via laser profilometry) typically drop below $1,000 but require recalibration of deposition parameters. Price variance also hinges on OEM—AMAT parts command 10–15% premiums over Ulvac equivalents due to tool compatibility.
Sputtering Target Specifications and Compatible Tools
Key specs:
- Power Handling: 2–8 kW (Ti/Al), 3–12 kW (Ta/Cu)
- Purity: 99.99% (Ti, Al), 99.95% (Ta), 99.999% (Cu)
- Voltage/Frequency: 13.56 MHz RF, 400–600 V DC bias
Compatible tools: - AMAT Endura P5000 (2008–2014), Centura DXZ (2005–2012)
- Ulvac TDM-5000 (2010–2016), TDM-C4 (2013–2018)
Exclusion: Avoid pairing Cu targets (part #CU-9001) with AMAT’s legacy HDP-CVD systems—thermal expansion mismatches cause delamination above 300°C.
What to Check Before Buying a Used Sputtering Target in 2026
- Erosion Depth: Use a laser profilometer to confirm remaining thickness ≥85% of OEM spec. Reject if >20% of surface shows macro-pitting.
- Backing Plate Integrity: Inspect for cracks via 10X magnifier; check thermal conductivity (should exceed 180 W/m·K with a CTD-300 tester).
- Purity Verification: Run EDXRF spectroscopy to confirm no contamination >50 ppm (
Recent Market Listings
Updated May 19$2,800
As-is$1,200
As-is$7,200
Certified$2,100
As-is$8,500
Certified| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $2,800 | As-is | May 6, 2026 |
| Last Sale | $1,200 | As-is | Apr 22, 2026 |
| Last Sale | $7,200 | Certified | Apr 1, 2026 |
| Last Sale | $2,100 | As-is | Mar 10, 2026 |
| Last Sale | $8,500 | Certified | Feb 5, 2026 |
Place a bid · Prices update daily
Recent Sales
Related Parts
Various (AMAT, Ulvac)
Used PVD Process Shield / Deposition Shield
Applied Materials
Applied Materials 0020-Series Chamber Parts
Applied Materials
Applied Materials 0190-Series Process Parts
Applied Materials
Applied Materials ESC — Electrostatic Chuck
Applied Materials
AMAT Centura Chamber Parts & Components
Applied Materials
AMAT Endura PVD Target & Shield Parts
Quick Info
Get a Quote
Market: $2K – $8K
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Used/Reclaimed Sputtering Target (Ti, Ta, Cu, Al).
All transactions are export compliant · Escrow available · parts@caladansemi.com