Various
Used 13.56 MHz RF Generator for Semiconductor
Various
Used 13.56 MHz RF Generator for Semiconductor
Market Price
↓ Falling$4K–$17K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$4K — $17K
Based on verified secondary market transactions
Last Sold
$7,200
May 4, 2026
RefurbishedHow much does a used Used 13.56 MHz RF Generator for Semiconductor cost in 2026?
A used Used 13.56 MHz RF Generator for Semiconductor from Various typically sells for $25k – $25k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used 13.56 MHz RF Generator for Semiconductor from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used 13.56 MHz RF Generator Cost in 2026?
Used units range from $4,000–$10,000, while refurbished models with power supply upgrades and EMI shielding cost $8,000–$17,000. New OEM replacements (e.g., from ENI or Ampleon) exceed $50,000, offering 92–93% savings for used parts and 66–84% savings for refurbished. Caveat: Units older than 10 years (post-2016 production) show a 30% higher failure rate in high-duty-cycle applications (>80% utilization). Always verify output stability via VNA testing before purchase.
13.56 MHz RF Generator Specifications and Compatible Tools
Key specs: 13.56 MHz ± 0.5 kHz frequency, 1000–2000W RF output, 208–480V AC input, and water-cooled design (1.5L/min flow, 50°C max inlet). Compatible with:
- Applied Materials Centura (2003–2012 models)
- Lam Research Endura (2005–2015 revisions)
- ASM AMAT P5000 (2008–2014 builds)
Exclusion: Not compatible with Tokyo Electron LEANIX systems (TE-LE-2200, 2010–2015) due to incompatible power modulation profiles. Verify SEMI S23-0803 compliance for plasma uniformity in CVD/etching tools.
What to Check Before Buying a Used 13.56 MHz RF Generator in 2026
- Output Stability: Use a VNA (e.g., Keysight N9912A) to confirm <1% frequency drift over 24 hours. Reject units >2% deviation.
- Cooling System: Measure water flow with a magnehelic gauge; flow rates below 1.2L/min risk overheating.
- ESD Rating: Ensure IEC 61000-4-2 compliance (≥10kV contact discharge). Units rated <8kV fail in high-chamber-pressure environments.
- Maintenance History: Units without records from 2018–2023 are 40% more likely to require power supply replacement.
- Lifecycle Age: Avoid models produced pre-2015; capacitors (e.g., WIMA MKS series) degrade after 12+ years of continuous use.
FAQ
Q: Is a 13.56 MHz RF generator interchangeable with 27.12 MHz units?
A: No. 13.56 MHz is standard for high-density plasma applications (CVD, PECVD). 27.12 MHz generators are niche (e.g., RIE tools) and incompatible due to wavelength/plasma coupling differences.
Q: How to verify compatibility with my etch tool?
A: Cross
Recent Market Listings
Updated May 19$7,200
Refurbished$2,800
As-is$15,500
Certified$5,800
Refurbished$18,000
Certified| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $7,200 | Refurbished | May 4, 2026 |
| Last Sale | $2,800 | As-is | Apr 18, 2026 |
| Last Sale | $15,500 | Certified | Mar 8, 2026 |
| Last Sale | $5,800 | Refurbished | Feb 14, 2026 |
| Last Sale | $18,000 | Certified | Jan 5, 2026 |
Place a bid · Prices update daily
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Quick Info
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