Various
Used 13.56 MHz RF Generator for Semiconductor
Various
Used 13.56 MHz RF Generator for Semiconductor
Market Price
Request Quote — No current market data
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Request Quote →Last verified: 2026-05-11
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Pricing
Price on request — quote in 4 hours
Market pricing for Used 13.56 MHz RF Generator for Semiconductor moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used 13.56 MHz RF Generator for Semiconductor cost in 2026?
Pricing for used Used 13.56 MHz RF Generator for Semiconductor units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used 13.56 MHz RF Generator for Semiconductor from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
13.56 MHz RF Generator Specifications and Compatible Tools
Key specs: 13.56 MHz ± 0.5 kHz frequency, 1000–2000W RF output, 208–480V AC input, and water-cooled design (1.5L/min flow, 50°C max inlet). Compatible with:
- Applied Materials Centura (2003–2012 models)
- Lam Research Endura (2005–2015 revisions)
- ASM AMAT P5000 (2008–2014 builds)
Exclusion: Not compatible with Tokyo Electron LEANIX systems (TE-LE-2200, 2010–2015) due to incompatible power modulation profiles. Verify SEMI S23-0803 compliance for plasma uniformity in CVD/etching tools.
What to Check Before Buying a Used 13.56 MHz RF Generator in 2026
- Output Stability: Use a VNA (e.g., Keysight N9912A) to confirm <1% frequency drift over 24 hours. Reject units >2% deviation.
- Cooling System: Measure water flow with a magnehelic gauge; flow rates below 1.2L/min risk overheating.
- ESD Rating: Ensure IEC 61000-4-2 compliance (≥10kV contact discharge). Units rated <8kV fail in high-chamber-pressure environments.
- Maintenance History: Units without records from 2018–2023 are 40% more likely to require power supply replacement.
- Lifecycle Age: Avoid models produced pre-2015; capacitors (e.g., WIMA MKS series) degrade after 12+ years of continuous use.
FAQ
Q: Is a 13.56 MHz RF generator interchangeable with 27.12 MHz units?
A: No. 13.56 MHz is standard for high-density plasma applications (CVD, PECVD). 27.12 MHz generators are niche (e.g., RIE tools) and incompatible due to wavelength/plasma coupling differences.
Q: How to verify compatibility with my etch tool?
A: Cross
Recent Market Listings
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