Used 60 MHz RF Generator (VHF Source Power)

Name: Used 60 MHz RF Generator (VHF Source Power)
Brand: Various
Price: 24900 USD
Availability: InStock

Market Price

→ Stable

1 active listing

From $25K

Typical secondary market pricing · USD

Low $24,900Avg $24,900High $24,900

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $25K – $25K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used 60 MHz RF Generator (VHF Source Power)

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Used 60 MHz RF Generator (VHF Source Power) cost in 2026?

A used Used 60 MHz RF Generator (VHF Source Power) from Various typically sells for $25k – $25k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used 60 MHz RF Generator (VHF Source Power) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a 60 MHz RF Generator Cost in 2026?

Used units priced $3,500–$12,000 in 2026, refurbished models $8,000–$18,000. New OEM equivalents average $48,000–$65,000, offering 93% savings for used and 84% for refurbished. Units with <5 years of operational history and <1,500 cumulative hours of plasma use command premium pricing. Caveat: Generators with output power degradation >8% (measured via vector network analyzer) require capacitor bank replacement, adding $1,200–$2,500 to total cost.

60 MHz RF Generator Specifications and Compatible Tools

Operates at 59.9–60.1 MHz, 1,000–2,000W output, 208V/240V AC input, 50–60Hz line frequency. Efficiency ≥92% at rated power. Compatible with:

Applied Materials Centura (models 5500/6500, 2008–2015 production)
Lam Research P5 Etch (models 8200/8400, 2010–2017)
AMAT Reflexion PVD (models R2300/R2800, 2012–2019)
Exclusion: Not compatible with Axcelis 3200 Series (part #AX-320-RF60) due to mismatched impedance termination. Verify tool’s RF input impedance (50Ω vs 75Ω) before installation.

What to Check Before Buying a Used 60 MHz RF Generator in 2026

Output Stability: Use a spectrum analyzer to confirm frequency deviation <±0.05 MHz under full load.
Insulation Resistance: Measure >100 MΩ between high-voltage terminals and chassis using a megohmmeter; <50 MΩ indicates dielectric breakdown.
Thermal Stress: Inspect IGBT modules for delamination (common in units >8 years old).
Cooling System: Verify liquid-cooled units maintain flow rate ≥3.5 L/min at 0.3 bar pressure.
Capacitor Health: Reject units with electrolytic capacitors bulging >0.5 mm or ESR >0.2Ω (test with ESR meter). Units with >2,000 operational cycles require derating by 15%.

FAQ

Q: Is a 60 MHz RF generator better than 13.56 MHz for plasma etching?
A: 60 MHz (VHF) offers higher plasma density for sub-10nm etch processes but requires tighter impedance matching. 13.56 MHz (RF) is standard for lower-frequency deposition tools.

Q: How to test a used RF generator’s output accuracy?
A: Connect to a calibrated RF load and use a power sensor with a dynamic range >–20 dBm to +30 dBm.

Q: Can I upgrade a 60 MHz unit for 13.56 MHz operation?
A: No. Frequency conversion requires replacing oscillators and impedance-matching networks, exceeding