Various
Used 60 MHz RF Generator (VHF Source Power)
Various
Used 60 MHz RF Generator (VHF Source Power)
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Used 60 MHz RF Generator (VHF Source Power) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used 60 MHz RF Generator (VHF Source Power) cost in 2026?
Pricing for used Used 60 MHz RF Generator (VHF Source Power) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used 60 MHz RF Generator (VHF Source Power) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
60 MHz RF Generator Specifications and Compatible Tools
Operates at 59.9–60.1 MHz, 1,000–2,000W output, 208V/240V AC input, 50–60Hz line frequency. Efficiency ≥92% at rated power. Compatible with:
- Applied Materials Centura (models 5500/6500, 2008–2015 production)
- Lam Research P5 Etch (models 8200/8400, 2010–2017)
- AMAT Reflexion PVD (models R2300/R2800, 2012–2019)
Exclusion: Not compatible with Axcelis 3200 Series (part #AX-320-RF60) due to mismatched impedance termination. Verify tool’s RF input impedance (50Ω vs 75Ω) before installation.
What to Check Before Buying a Used 60 MHz RF Generator in 2026
- Output Stability: Use a spectrum analyzer to confirm frequency deviation <±0.05 MHz under full load.
- Insulation Resistance: Measure >100 MΩ between high-voltage terminals and chassis using a megohmmeter; <50 MΩ indicates dielectric breakdown.
- Thermal Stress: Inspect IGBT modules for delamination (common in units >8 years old).
- Cooling System: Verify liquid-cooled units maintain flow rate ≥3.5 L/min at 0.3 bar pressure.
- Capacitor Health: Reject units with electrolytic capacitors bulging >0.5 mm or ESR >0.2Ω (test with ESR meter). Units with >2,000 operational cycles require derating by 15%.
FAQ
Q: Is a 60 MHz RF generator better than 13.56 MHz for plasma etching?
A: 60 MHz (VHF) offers higher plasma density for sub-10nm etch processes but requires tighter impedance matching. 13.56 MHz (RF) is standard for lower-frequency deposition tools.
Q: How to test a used RF generator’s output accuracy?
A: Connect to a calibrated RF load and use a power sensor with a dynamic range >–20 dBm to +30 dBm.
Q: Can I upgrade a 60 MHz unit for 13.56 MHz operation?
A: No. Frequency conversion requires replacing oscillators and impedance-matching networks, exceeding
Recent Market Listings
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