Various
Used Silicon Chamber Liner for Etch
Various
Used Silicon Chamber Liner for Etch
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Silicon Chamber Liner for Etch moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Silicon Chamber Liner for Etch cost in 2026?
Pricing for used Used Silicon Chamber Liner for Etch units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Silicon Chamber Liner for Etch from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Silicon Chamber Liner for Etch Specifications and Compatible Tools
Key specs: high-purity silicon or fused quartz construction, max RF power 2–5 kW, operating temp range -20°C to 300°C, and pressure rating up to 10 Torr. Compatible with:
- Applied Materials Centura (1998–2005, model 5500-93212)
- Lam Research Lexis (2000–2007, model LR-LEX-CHL-3.2)
- Tokyo Electron HEP-5000 (2002–2010, model TE-HEP-CL-04)
Exclusion: Not compatible with Axcelis 3200 series (PN: AX-CHL-32) due to mismatched port threading (NPT vs. ISO 228).
What to Check Before Buying a Used Silicon Chamber Liner in 2026
- Etch depth: Use a digital micrometer to measure wall erosion. Reject parts with depths >0.3mm (new baseline: ≤0.15mm).
- Crack inspection: UV light (365nm wavelength) to detect microfractures in quartz/silicon interfaces.
- Thickness tolerance: Caliper check for uniformity. Liners <4.5mm in critical zones fail thermal stress tests.
- Surface finish: profilometer scan for Ra >1.2µm (spec: ≤0.8µm).
- OEM lifecycle: Avoid parts from tools with >15k process cycles (per SEMI E142-0800).
FAQ
Q: How long does a silicon chamber liner last?
A: 8–12k cycles, depending on etch depth and plasma chemistry.
Recent Market Listings
Updated Sep 30No recent market activity for Used Silicon Chamber Liner for Etch.
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