Used Silicon Chamber Liner for Etch

Name: Used Silicon Chamber Liner for Etch
Brand: Various
Price: 2250 USD
Availability: InStock

Market Price

→ Stable

$500–$4K

Typical secondary market pricing · USD

Low $500Avg $2,250High $4,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $500 – $4K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Silicon Chamber Liner for Etch cost in 2026?

A used Used Silicon Chamber Liner for Etch from Various typically sells for $500 – $4k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Silicon Chamber Liner for Etch from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Silicon Chamber Liner for Etch Cost in 2026?

Used silicon chamber liners for etch (PN: varies by OEM) will range from $1,200 to $3,500 in 2026, depending on OEM and condition. Refurbished units with resurfaced walls and verified etch-depth measurements (≤0.2mm) will cost $4,500–$8,000, saving buyers 40–65% compared to new parts ($7,500–$12,000). Liners with etch depths exceeding 0.3mm or visible microcracks must be rejected, as they risk particulate generation during plasma ignition.

Silicon Chamber Liner for Etch Specifications and Compatible Tools

Key specs: high-purity silicon or fused quartz construction, max RF power 2–5 kW, operating temp range -20°C to 300°C, and pressure rating up to 10 Torr. Compatible with:

Applied Materials Centura (1998–2005, model 5500-93212)
Lam Research Lexis (2000–2007, model LR-LEX-CHL-3.2)
Tokyo Electron HEP-5000 (2002–2010, model TE-HEP-CL-04)
Exclusion: Not compatible with Axcelis 3200 series (PN: AX-CHL-32) due to mismatched port threading (NPT vs. ISO 228).

What to Check Before Buying a Used Silicon Chamber Liner in 2026

Etch depth: Use a digital micrometer to measure wall erosion. Reject parts with depths >0.3mm (new baseline: ≤0.15mm).
Crack inspection: UV light (365nm wavelength) to detect microfractures in quartz/silicon interfaces.
Thickness tolerance: Caliper check for uniformity. Liners <4.5mm in critical zones fail thermal stress tests.
Surface finish: profilometer scan for Ra >1.2µm (spec: ≤0.8µm).
OEM lifecycle: Avoid parts from tools with >15k process cycles (per SEMI E142-0800).