Used TEL Chamber Liner / Shield

Name: Used TEL Chamber Liner / Shield
Brand: Tokyo Electron (TEL)
Price: 2800 USD
Availability: InStock

Market Price

→ Stable

$600–$5K

Typical secondary market pricing · USD

Low $600Avg $2,800High $5,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $600 – $5K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used TEL Chamber Liner / Shield cost in 2026?

A used Used TEL Chamber Liner / Shield from Tokyo Electron (TEL) typically sells for $600 – $5k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Tokyo Electron (TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used TEL Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used TEL Chamber Liner / Shield Cost in 2026?

Used TEL chamber liners (part # unspecified) range from $1,200 to $8,500 in 2026, depending on material (quartz vs. aluminum) and condition. Refurbished units with OEM-coated surfaces cost $2,000–$12,000, offering 40–65% savings vs. new ($3,500–$18,000). Caveat: Liners with >3 visible microcracks (detected via 5X magnification) or <4.5mm thickness reduction from original 6.0mm spec should be discounted by 30% due to plasma leakage risks.

TEL Chamber Liner / Shield Specifications and Compatible Tools

Key specs: Quartz or 6061-T6 aluminum construction, 12–18mm thickness, 450°C max operating temp, 1–10 mTorr vacuum compatibility. Compatible with TEL DPS-5000 (2010–2015), ProD-200 (2008–2012), and CVD-3000i (2013–2017) tools. Exclusion: Not compatible with TEL HDP-CVD model ABC-3000 (requires part # TEL-LINER-45Z). Verify tool’s RF frequency (13.56MHz vs 2MHz variants) to avoid mismatch.

What to Check Before Buying a Used TEL Chamber Liner / Shield in 2026

Surface integrity: Use 5X magnifier to inspect for cracks >0.2mm or pitting clusters. Reject if >10% surface area shows defects.
Thickness measurement: Confirm min. 4.5mm remaining via digital caliper (Mitutoyo 500-196-30). Below 4.0mm risks arcing.
Coating adhesion: Apply 10% HCl solution; if coating dissolves in <30 seconds, reject (indicates poor anodization).
Particulate history: Request process logs—liners from high-particulate tools (e.g., etch processes) have 2x higher failure rates after 5 years.
OEM service date: Avoid units >8 years old without full refurbishment; TEL’s lifecycle data shows 70% failure rate past this threshold.

FAQ

Q: Is a used TEL chamber liner safe for high-vacuum processes?
A: Yes, if it passes 10 mTorr leak rate testing with helium mass spectrometer and shows no delamination.

Q: How to clean a used TEL liner before installation?
A: Sonicate in 99% isopropyl alcohol for 15 mins, then rinse with deionized water and dry in N₂ purge.

Q: Used vs. refurbished TEL liner—what’s the difference?
A: Refurbished units include replaced wear surfaces and re