Used TEL Chamber Liner / Shield

Name: Used TEL Chamber Liner / Shield
Brand: Tokyo Electron (TEL)

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used TEL Chamber Liner / Shield moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used TEL Chamber Liner / Shield cost in 2026?

Pricing for used Used TEL Chamber Liner / Shield units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron (TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used TEL Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

TEL Chamber Liner / Shield Specifications and Compatible Tools

Key specs: Quartz or 6061-T6 aluminum construction, 12–18mm thickness, 450°C max operating temp, 1–10 mTorr vacuum compatibility. Compatible with TEL DPS-5000 (2010–2015), ProD-200 (2008–2012), and CVD-3000i (2013–2017) tools. Exclusion: Not compatible with TEL HDP-CVD model ABC-3000 (requires part # TEL-LINER-45Z). Verify tool’s RF frequency (13.56MHz vs 2MHz variants) to avoid mismatch.

What to Check Before Buying a Used TEL Chamber Liner / Shield in 2026

Surface integrity: Use 5X magnifier to inspect for cracks >0.2mm or pitting clusters. Reject if >10% surface area shows defects.
Thickness measurement: Confirm min. 4.5mm remaining via digital caliper (Mitutoyo 500-196-30). Below 4.0mm risks arcing.
Coating adhesion: Apply 10% HCl solution; if coating dissolves in <30 seconds, reject (indicates poor anodization).
Particulate history: Request process logs—liners from high-particulate tools (e.g., etch processes) have 2x higher failure rates after 5 years.
OEM service date: Avoid units >8 years old without full refurbishment; TEL’s lifecycle data shows 70% failure rate past this threshold.

FAQ

Q: Is a used TEL chamber liner safe for high-vacuum processes?
A: Yes, if it passes 10 mTorr leak rate testing with helium mass spectrometer and shows no delamination.

Q: How to clean a used TEL liner before installation?
A: Sonicate in 99% isopropyl alcohol for 15 mins, then rinse with deionized water and dry in N₂ purge.

Q: Used vs. refurbished TEL liner—what’s the difference?
A: Refurbished units include replaced wear surfaces and re