Used Tokyo Electron (TEL) Electrostatic Chuck

Name: Used Tokyo Electron (TEL) Electrostatic Chuck
Brand: Tokyo Electron (TEL)

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Tokyo Electron (TEL) Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Tokyo Electron (TEL) Electrostatic Chuck cost in 2026?

Pricing for used Used Tokyo Electron (TEL) Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron (TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Tokyo Electron (TEL) Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Tokyo Electron (TEL) Electrostatic Chuck Specifications and Compatible Tools

Key specs: 5 kV DC operating voltage, 200 W max power, 300 mm wafer capacity, and 1.2 mm dielectric thickness (alumina ceramic). Compatible with TEL FAS-2000 (2005–2010), P-5000 (2012–2018), and CEA-1000 (2008–2015) systems. Exclusion: Do not install on FAS-3000 models (part number ESC-TN45B) without voltage regulator upgrades—these require 8 kV DC and will arc without hardware modifications. Cross-check tool’s plasma generator model (e.g., PG-750A) for compatibility.

What to Check Before Buying a Used TEL Electrostatic Chuck in 2026

Electrode thickness: Measure with a digital micrometer; <0.8 mm indicates excessive wear (replacement threshold).
Dielectric leakage: Use a high-voltage megohmmeter (e.g., Fluke 1508) to test insulation resistance; >10^12 Ω @ 5 kV DC is acceptable.
Vacuum port integrity: Pressurize with 5 psi N₂ and scan with a helium leak detector; >1×10⁻⁶ mbar·L/s indicates seal failure.
Cycle count: Request PLC logs—units with >15,000 cycles (pre-2019 manufacturing) have 40% higher failure rates per TEL 2025 field data.
Wafer lift pin alignment: Measure pin travel with a dial gauge; >±0.1 mm deviation causes wafer warping.

FAQ

Q: Used vs. refurbished TEL ESC—what’s the difference?
A: Used units retain original components; refurbished includes electrode replacement, vacuum seal upgrades, and high-voltage testing. Refurbished parts carry longer warranties (typically 12–18 months vs. 6 months used).

Q: Can a TEL ESC work with non-TEL plasma tools?
A: Yes, if the tool accepts 5 kV DC and has compatible wafer dimensions (e.g., Lam Research Centura with adapter kit). Verify vacuum interface thread size (M12×1.