Used Tokyo Electron (TEL) Electrostatic Chuck

Name: Used Tokyo Electron (TEL) Electrostatic Chuck
Brand: Tokyo Electron (TEL)
Price: 17000 USD
Availability: InStock

Market Price

→ Stable

11 active listings

$4K–$30K

Typical secondary market pricing · USD

Low $4,000Avg $17,000High $30,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $4K – $30K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Tokyo Electron (TEL) Electrostatic Chuck cost in 2026?

A used Used Tokyo Electron (TEL) Electrostatic Chuck from Tokyo Electron (TEL) typically sells for $4k – $30k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Tokyo Electron (TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Tokyo Electron (TEL) Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Tokyo Electron (TEL) Electrostatic Chuck Cost in 2026?

Used TEL electrostatic chucks (ESC) priced between $8,500–$35,000 in 2026, depending on electrode wear and dielectric integrity. Refurbished units (with replaced electrodes and vacuum seals) range from $12,000–$40,000, saving 30–50% vs. new ($25,000–$75,000). Caveat: Units with >10,000 operational cycles (per TEL spec sheet) typically drop 15–20% in value due to accelerated electrode erosion. Always verify cycle count via the chuck’s internal PLC log or OEM calibration sticker.

Tokyo Electron (TEL) Electrostatic Chuck Specifications and Compatible Tools

Key specs: 5 kV DC operating voltage, 200 W max power, 300 mm wafer capacity, and 1.2 mm dielectric thickness (alumina ceramic). Compatible with TEL FAS-2000 (2005–2010), P-5000 (2012–2018), and CEA-1000 (2008–2015) systems. Exclusion: Do not install on FAS-3000 models (part number ESC-TN45B) without voltage regulator upgrades—these require 8 kV DC and will arc without hardware modifications. Cross-check tool’s plasma generator model (e.g., PG-750A) for compatibility.

What to Check Before Buying a Used TEL Electrostatic Chuck in 2026

Electrode thickness: Measure with a digital micrometer; <0.8 mm indicates excessive wear (replacement threshold).
Dielectric leakage: Use a high-voltage megohmmeter (e.g., Fluke 1508) to test insulation resistance; >10^12 Ω @ 5 kV DC is acceptable.
Vacuum port integrity: Pressurize with 5 psi N₂ and scan with a helium leak detector; >1×10⁻⁶ mbar·L/s indicates seal failure.
Cycle count: Request PLC logs—units with >15,000 cycles (pre-2019 manufacturing) have 40% higher failure rates per TEL 2025 field data.
Wafer lift pin alignment: Measure pin travel with a dial gauge; >±0.1 mm deviation causes wafer warping.

FAQ

Q: Used vs. refurbished TEL ESC—what’s the difference?
A: Used units retain original components; refurbished includes electrode replacement, vacuum seal upgrades, and high-voltage testing. Refurbished parts carry longer warranties (typically 12–18 months vs. 6 months used).

Q: Can a TEL ESC work with non-TEL plasma tools?
A: Yes, if the tool accepts 5 kV DC and has compatible wafer dimensions (e.g., Lam Research Centura with adapter kit). Verify vacuum interface thread size (M12×1.