Used Vacuum Wafer Chuck

Name: Used Vacuum Wafer Chuck
Brand: Various

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Vacuum Wafer Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Vacuum Wafer Chuck cost in 2026?

Pricing for used Used Vacuum Wafer Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Vacuum Wafer Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Vacuum Wafer Chuck Specifications and Compatible Tools

Key specs: vacuum pressure range 0.01–10 mTorr, maximum wafer size 300mm, power draw 12V DC @ 2.5A, and surface flatness <5µm deviation. Compatible with:

Applied Materials Centura FXE (2012–2018)
Lam Research Endura P5000 (2014–2020)
Tokyo Electron Alpha Prime R2 (2016–2021)
Warning: Do not install on Veeco Nexus 8000 systems (PN 743-002123); incompatible port threading (NPT vs ISO 228). Verify chuck’s O-ring material (fluorocarbon vs silicone) for tool-specific chemical resistance.

What to Check Before Buying a Used Vacuum Wafer Chuck in 2026

Leak rate: Use a helium mass spectrometer; reject if >1×10⁻⁶ mbar·L/s.
Surface wear: Measure flatness with a 5µm-resolution optical profiler; >8µm deviation invalidates 300mm compatibility.
Cycle count: Cross-reference with the seller’s log; chucks with >3,500 cycles risk seal failure (per SEMI E142-0805).
Coating integrity: UV light inspection for delamination in electrostatic discharge layers; >5% coverage loss requires recoating.
Port corrosion: Use a micrometer to check NPT thread wear; threads must retain 90%+ original depth for airtight sealing.

FAQ

Q: How to test a used vacuum chuck’s seal without specialized equipment?
A: Apply soapy water to ports and seams during vacuum draw; bubbles indicate leaks. This method detects >90% of gross failures but misses microleaks.

Q: Used vs. refurbished vacuum chucks—what’s the difference?
A: Refurbished units include replaced O-rings, coatings, and pressure sensors (per OEM specs). Used chucks may retain original seals, requiring post-purchase testing.

Q: Can a 200mm chuck work in a 300mm tool?
A: No. The smaller chuck’s mounting footprint and vacuum port alignment will mismatch, risking wafer misalignment and tool damage.

Q: What’s the average lifespan of a vacuum chuck in a plasma etch tool?
A: 2,500–4,000 cycles, depending on chamber cleanliness. High particulate loads reduce lifespan by 30–50%.