Varian Semiconductor
107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor)
Varian Semiconductor
107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor)
Part No. 107510001
Market Price
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Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for 107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used 107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor) cost in 2026?
Pricing for used 107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Varian Semiconductor Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 107510001 — Ion Beam Filter Assembly (VIISta 900) (Varian Semiconductor) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
107510001 Specifications and Compatible Tools
The 107510001 operates at 2.0 kV DC, 13.56 MHz RF, and supports 500 W peak power. It filters ion beam contamination in sputter deposition systems. Compatible tools include:
- Varian VIISta 900 (2005–2012)
- Varian VIISta 810 (2003–2008)
Warning: Do not install in systems using part 107510005 (VIISta 700 models), as the 107510001 lacks the 700-series’ low-profile mounting bracket. Always verify tool firmware version (V7.2+ required for VIISta 900 compatibility).
What to Check Before Buying a Used 107510001 in 2026
- Voltage Output: Use a calibrated multimeter to confirm 1950–2050 V DC under load. Reject units <1900 V.
- Frequency Stability: Test with a spectrum analyzer; drift >±0.1% at 13.56 MHz indicates coil failure.
- Filter Media Integrity: Inspect with a UV-Vis spectrometer. Reject if contamination exceeds 5% surface blockage.
- RF-Hour Count: Units >40,000 RF-hours require replacement of the primary ceramic insulator (part 107510009).
- Installation Date: Avoid units installed before 2013—aluminum oxide capacitors degrade after 10+ years in high-vacuum environments.
**Q
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