64134-GE02-ANN1 — Pendulum Valve, DN160 CF (VAT)

How Much Does VAT 64134-GE02-ANN1 Cost in 2026?

Used units ($3,500–$5,500) typically show 150,000–300,000 cycles. Inspect for carbon deposits around the seat (indicates gas leakage) and measure motor coil resistance. These work for non-critical chambers or backup tools. We reject units with resistance outside 18.5Ω ±0.3Ω or visible seat damage.

Refurbished units ($6,200–$8,800) include new VAT OEM bellows, re-machined pendulum plate, calibrated position sensor, and 90-day warranty. Units with full test reports (pressure control accuracy ±0.1 Torr) command the upper end. For production etch tools running 7nm/5nm processes, refurbished is essential—pressure drift kills yield.

New OEM ($18,500–$20,200) from VAT direct with 12-month warranty and 8–12 week lead time. Savings vs. new: 55–70% for refurbished, 75–85% for tested used. Never pay >$9,000 for "like-new" used without documentation—it's either defective or misrepresented.

VAT 64134-GE02-ANN1 Specifications and Compatible Tools

Key specs: DN160 Conflat (CF-160) flange, electromechanical actuator, ±0.1 Torr pressure control accuracy, 1e-9 sccm He leak rate (new), 18.5Ω ±0.3Ω motor coil resistance, <1.8A operating current, 500,000 cycle MTTF.

Compatible tools:

• AMAT Centura 300mm DPS II (Mk2 chassis, serial #C300-XXXXX+, 2002–2010)
• Lam Research 2300 G Conductive Etch (all revisions, chamber ID suffix -001/-002, 2003–2009)
• TEL NEXUS e12 Plus (300mm metal etch configuration, 2005–2012)
• AMAT Producer SE (300mm etch module, tool ID PROD-SE-300-ETCH, 2004–2011)
• Lam Research 2300 Kiyo G (with VAT-compatible exhaust manifold, 2006–2013)

Note: Older AMAT Centura G (300mm, serial #C300-G-XXXXX+) uses different mounting bracket. Verify chassis revision before ordering.

What to Check Before Buying a Used VAT 64134-GE02-ANN1 in 2026

1. Bellows integrity: Inspect under 10x magnifier for pinholes or tears near weld points. Disqualify immediately if any micro-cracks visible—this is the #1 failure mode.

2. Seat surface condition: Check pendulum plate sealing surface for scratches >0.1mm deep or pitting using feeler gauge. Reject if surface isn't mirror-smooth—pressure control depends on perfect seal.

3. Motor coil resistance: Measure at connector pins 1-2 with multimeter. Must read 18.5Ω ±0.3Ω. Outside this range indicates winding damage or overheating. Scrap if out of spec.

4. Actuator lateral play: Manually cycle valve stem through full range. Maximum 0.05mm lateral movement allowed. Excess play = worn bearings = erratic positioning.

5. Position sensor calibration: Verify valve achieves commanded positions within ±2% across full stroke. Erratic response causes pressure overshoot during recipe transitions.

FAQ

Q: What's the difference between GE02-ANN1 and GE02-AAN1?
A: ANN1 has integrated position sensor with 0–10V feedback. AAN1 is basic on/off without analog feedback. ANN1 is required for pressure control applications; AAN1 only works for isolation duty.

Q: Why does my Centura DPS II show Error 12-543 during contact etch?
A: "Pressure Control Fault" during recipe step transitions indicates the pendulum valve isn't maintaining ±0.1 Torr accuracy. Check for motor current spikes >1.8A, pressure spikes >2.5 Torr during O₂ purge, or black carbon deposits at the seat during PM.

Q: Can pressure control issues be caused by other components?
A: Yes—verify MKS 628 pressure gauge calibration and turbo pump speed before blaming the valve. But if you see motor current >1.8A during valve movement combined with pressure overshoot, the valve is the culprit.

Q: How long does refurbishment take if I send my core?
A: Standard turnaround is 5–7 business days for bellows replacement, seat reconditioning, and calibration. Expedited 24-hour service available for production-critical tools.

Stop the scrap. This valve kills yield when it drifts. Caladan Semi ships tested VAT 64134-GE02-ANN1 valves with full calibration data—no "maybe it works." Request quote →