Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD

Name: Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD
Brand: Lam Research
SKU: 796-052341-001

Part No. 796-052341-001

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD cost in 2026?

Pricing for used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Flow Control vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 796-052341-001 Specifications and Compatible Tools

Dimensions: 300mm diameter, 15mm thickness, 0.3mm wall tolerance
Material: 6061-T6 aluminum with PTFE gas orifices (0.8mm ID)
Gas Flow: 0–500 sccm SiH₄/N₂O, 200–1000 sccm NH₃
Voltage: 200V DC (plasma ignition), 13.56 MHz RF bias
Compatible with:
Lam Vector SE (2008–2015)
Lam Vector MX (2012–2018)
Lam Centura P5500 (2010–2017)
Exclusion: Do not install in Lam Pinnacle HiPnP (P/N 796-052341-002)—incompatible RF coupling design.

What to Check Before Buying a Used Lam Research 796-052341-001 in 2026

Crack Inspection: Use 100× digital microscope; reject parts with >0.1mm radial fractures near gas ports.
Thickness Measurement: Calibrate with a 5μm-tolerance micrometer; ensure 14.8–15.2mm wall thickness.
Gas Uniformity Test: Run 10% NH₃ flow at 250°C; deviation >3% across wafer surface invalidates part.
Plasma Ignition Voltage: Measure with a Fluke 434 II; >220V DC indicates eroded electrode tips.
Cycle History: Reject parts with >800 cycles (per Lam SRD-2023-09 lifecycle data).