Lam Research
Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD
Lam Research
Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD
Part No. 796-052341-001
Market Price
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Market Data
Coming Soon for Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD
Price history and market activity data is being compiled.
How much does a used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD cost in 2026?
Pricing for used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.
Used Lam Research Flow Control vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 796-052341-001 Cost in 2026?
Used units range from $12,000 to $18,000, while refurbished variants (with plasma faceplate recoating) cost $15,000–$22,000. New OEM parts exceed $45,000, offering 65–70% savings with used/refurbished options. Critical caveat: parts with >500 process cycles show >7% gas dispersion variance, violating ISO 14644-1 Class 5 cleanroom standards. Always verify cycle count via tool log history.
Lam Research 796-052341-001 Specifications and Compatible Tools
- Dimensions: 300mm diameter, 15mm thickness, 0.3mm wall tolerance
- Material: 6061-T6 aluminum with PTFE gas orifices (0.8mm ID)
- Gas Flow: 0–500 sccm SiH₄/N₂O, 200–1000 sccm NH₃
- Voltage: 200V DC (plasma ignition), 13.56 MHz RF bias
Compatible with: - Lam Vector SE (2008–2015)
- Lam Vector MX (2012–2018)
- Lam Centura P5500 (2010–2017)
Exclusion: Do not install in Lam Pinnacle HiPnP (P/N 796-052341-002)—incompatible RF coupling design.
What to Check Before Buying a Used Lam Research 796-052341-001 in 2026
- Crack Inspection: Use 100× digital microscope; reject parts with >0.1mm radial fractures near gas ports.
- Thickness Measurement: Calibrate with a 5μm-tolerance micrometer; ensure 14.8–15.2mm wall thickness.
- Gas Uniformity Test: Run 10% NH₃ flow at 250°C; deviation >3% across wafer surface invalidates part.
- Plasma Ignition Voltage: Measure with a Fluke 434 II; >220V DC indicates eroded electrode tips.
- Cycle History: Reject parts with >800 cycles (per Lam SRD-2023-09 lifecycle data).
FAQ
Recent Market Listings
Updated May 19No recent market activity for Lam Research 796-052341-001 Showerhead Electrode for Vector PECVD.
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