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MKS Instruments

MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge

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MKS Instruments

MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge

Part No. 2179A-10L00SV

Market Price

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge cost in 2026?

Pricing for used MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments Flow Control vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS 2179A-10L00SV Specifications and Compatible Tools

  • Max flow: 10 slpm N₂/O₂ (±1.0% accuracy)
  • Pressure range: 0–5 psig; 0–250 Torr vacuum
  • Voltage: 12–30 VDC; 4–20 mA output
  • Response time: <0.3 sec (step change)
    Compatible with:
  • AMAT Centura 300mm DPS II (P5/P6 stations, 2008–2014)
  • Lam Research Endura 300mm (models 8800-30, 2012–2015)
  • Tokyo Electron Lambda Flex (rev B3, 2010–2013)
    Exclusion: Do not install on tools requiring >10 slpm (e.g., MKS 2179A-25L00SV-rated systems).

What to Check Before Buying a Used MKS 2179A-10L00SV in 2026

  1. Flow accuracy: Test with dry gas standard; reject if >±1.5% deviation.
    2

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategoryFlow Control

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