01040-KE24-AAP1 — Gate Valve, DN40 CF (VAT)

VAT 01040-KE24-AAP1 Specifications and Compatible Tools

Key specs: DN40 Conflat (CF-40) flange, pneumatic actuator, 1e-9 sccm He leak rate (new), <1.2 sec open/close time, 500,000 cycle MTTF with OEM bellows.

Compatible tools:

• AMAT Centura 300mm DPS II (Module ID: C300DPS2-ETCH, Gen 4+ firmware)
• Lam Research Kiyo F (Model: KIYO-F-ETCH-300, 2003–2010 production)
• TEL Trias ECR (Part No: TR-ECR-ALD3, load lock isolation only)
• Hitachi High-Tech ECR Etch (Model: ECR-5000, foreline configuration)
• AMAT Producer GT (Chamber: PROD-GT-CVD3, gas line isolation)

Exclusion: Not compatible with 200mm Centura G-series (requires DN25 CF adapter) or PECVD systems without CF-40 foreline ports. Verify your tool's flange size before ordering—DN40 vs DN63 valves look identical but seal differently.

What to Check Before Buying a Used VAT 01040-KE24-AAP1 in 2026

1. CF flange face inspection: Reject if scratches >0.1mm deep or gouges visible under 10x magnification. Use a magnifying glass on both sealing surfaces—gouges = guaranteed vacuum leak.

2. Actuator cycle test: Manually cycle stem 10x. If it sticks at 50% open or requires >15 lbf force, the bellows is fatigued. Junk it.

3. Helium leak certificate: Demand test report showing <1e-9 sccm at 1 Torr differential. No paper = no buy. Caladan tests to this spec on every unit.

4. Gate position sensor: Verify open/close limit switches trigger within 1.2 seconds. Slower response indicates worn drive mechanism.

5. OEM tag verification: Missing VAT serial tag = counterfeit risk. Cross-check against VAT's database or demand refurbishment certificate from authorized service center.

FAQ

Q: Is VAT 01040-KE24-AAP1 compatible with AMAT Centura G-series 200mm?
A: No. 200mm G-series uses DN25 CF flanges. This DN40 valve requires an adapter that compromises sealing. Use VAT 01025-KE24-AAP1 for 200mm tools.

Q: How long does a refurbished VAT 01040-KE24-AAP1 last?
A: With OEM bellows replacement, expect 200,000+ cycles (4–6 years at typical duty). Used units without bellows replacement average 50,000 remaining cycles.

Q: What's the difference between VAT 01040-KE24-AAP1 and AAM1 variants?
A: AAP1 has pneumatic actuator; AAM1 has manual handwheel. Same valve body, different actuation. AAP1 is 3x faster (1.2 sec vs 3.5 sec cycle time).

Q: Can I rebuild a failed unit myself?
A: Technically yes, but VAT bellows assemblies require cleanroom welding. Field repairs without proper equipment achieve 1e-6 sccm leak rates at best—1000x worse than OEM spec.

Need VAT 01040-KE24-AAP1 now? Caladan Semi stocks certified refurbished units with helium test reports. Ships 24h from Austin, TX. Request quote →