iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum)

Name: iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum)
Brand: Edwards Vacuum
SKU: iXH600N

Part No. iXH600N

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) cost in 2026?

Pricing for used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Edwards Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

iXH600N Specifications and Compatible Tools

The iXH600N delivers 600 m³/hr dry pumping capacity, operating at 230V, 50Hz, 3-phase with a power draw of 110 kW. It’s designed for high-throughput semiconductor processes, with a 10-year service life under standard conditions. Compatible tools include AMAT Centura (models 2000–2023), Lam 2300 (all variants), and AMAT Producer CVD (2018–2022).

Avoid using the iXH600N with iXH600N-2015 variants, which have incompatible control boards. Always cross-reference tool schematics with the pump’s part number. 2026 spec sheets confirm the iXH600N’s compatibility with dry etch and CVD modules, but it’s not rated for wet processes. Verify voltage and frequency matches before installation.

What to Check Before Buying a Used iXH600N in 2026

Confirm RF-hour count: Reject units with >80,000 RF-hours unless they’ve been fully overhauled. Use a digital RF-hour meter to verify.
Test vacuum performance: Use a manometer to check for leaks. The iXH600N must achieve <10 Pa at full load.
Inspect seals and bearings: Look for cracks or wear on EPDM seals and ball bearings. Replace if damage exceeds 10% surface area.
Verify control board compatibility: Ensure the unit matches your tool’s PLC protocol (e.g., Modbus RTU).
Check for 2023–2025 service records: Units from 2020 or earlier may lack modern diagnostics.

FAQ

Q: Is the iXH600N better than the iXH600N-2015?
A: The iXH600N (2026 spec) includes upgraded digital control boards and enhanced cooling systems, making it more reliable than the older iXH600N-2015 variant.

Q: Can the iXH600N replace the AMAT Centura foreline pump?
A: Yes, the iXH600N is a direct replacement for AMAT Centura foreline pumps, provided the tool’s voltage and frequency match (230V, 50Hz).

Q: How do I test the iXH600N’s vacuum pump efficiency?
A: Use a helium leak detector to check for internal leaks. Run a 24-hour vacuum hold test at 10 Pa; pressure rise >5 Pa indicates failure.

Q: Are 2026 iXH600N units compatible with Lam 2300 tools?
A: Yes, all 2026 iXH600N units are compatible with Lam 2300 tools, but confirm the tool’s maximum flow rate matches the pump’s 600 m³/hr capacity.