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Edwards Vacuum

iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum)

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Edwards Vacuum

iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum)

Name: iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum)
Brand: Edwards Vacuum
SKU: iXH600N
Price: 3478 USD
Availability: InStock

Part No. iXH600N

Market Price

→ Stable

3 active listings

$1K–$6K

Typical secondary market pricing · USD

Low $1,445Avg $3,478High $5,510

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $1K – $6K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) cost in 2026?

A used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) from Edwards Vacuum typically sells for $1k – $6k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Edwards Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used iXH600N — iXH600N Dry Vacuum Pump, 600 m³/hr (Edwards Vacuum) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does iXH600N Cost in 2026?

Used iXH600N dry vacuum pumps in 2026 range from $1,445 to $5,510, depending on condition and RF-hour count. Units with <40,000 RF-hours typically fall in the lower end of this range, while those with >60,000 RF-hours command higher prices. Refurbished units, which include factory-overhaul and full warranty, start at $3,200 and climb to $5,510. Savings vs. new OEM list price (which exceeds $12,000) are 50–70%.

Condition-grade B units are functional but may show wear on seals or bearings. Avoid units with >80,000 RF-hours unless they’ve undergone full rebuild. 2026 pricing reflects tight supply, with lead times extending to 4 weeks post-sourcing. Buyers should verify RF-hour logs and confirm whether the unit is compatible with their specific tool model.

iXH600N Specifications and Compatible Tools

The iXH600N delivers 600 m³/hr dry pumping capacity, operating at 230V, 50Hz, 3-phase with a power draw of 110 kW. It’s designed for high-throughput semiconductor processes, with a 10-year service life under standard conditions. Compatible tools include AMAT Centura (models 2000–2023), Lam 2300 (all variants), and AMAT Producer CVD (2018–2022).

Avoid using the iXH600N with iXH600N-2015 variants, which have incompatible control boards. Always cross-reference tool schematics with the pump’s part number. 2026 spec sheets confirm the iXH600N’s compatibility with dry etch and CVD modules, but it’s not rated for wet processes. Verify voltage and frequency matches before installation.

What to Check Before Buying a Used iXH600N in 2026

Confirm RF-hour count: Reject units with >80,000 RF-hours unless they’ve been fully overhauled. Use a digital RF-hour meter to verify.
Test vacuum performance: Use a manometer to check for leaks. The iXH600N must achieve <10 Pa at full load.
Inspect seals and bearings: Look for cracks or wear on EPDM seals and ball bearings. Replace if damage exceeds 10% surface area.
Verify control board compatibility: Ensure the unit matches your tool’s PLC protocol (e.g., Modbus RTU).
Check for 2023–2025 service records: Units from 2020 or earlier may lack modern diagnostics.

FAQ

Q: Is the iXH600N better than the iXH600N-2015?
A: The iXH600N (2026 spec) includes upgraded digital control boards and enhanced cooling systems, making it more reliable than the older iXH600N-2015 variant.

Q: Can the iXH600N replace the AMAT Centura foreline pump?
A: Yes, the iXH600N is a direct replacement for AMAT Centura foreline pumps, provided the tool’s voltage and frequency match (230V, 50Hz).

Q: How do I test the iXH600N’s vacuum pump efficiency?
A: Use a helium leak detector to check for internal leaks. Run a 24-hour vacuum hold test at 10 Pa; pressure rise >5 Pa indicates failure.

Q: Are 2026 iXH600N units compatible with Lam 2300 tools?
A: Yes, all 2026 iXH600N units are compatible with Lam 2300 tools, but confirm the tool’s maximum flow rate matches the pump’s 600 m³/hr capacity.