Used Edwards NVS 300 Dry Vacuum Pump

How Much Does a Used Edwards NVS 300 Dry Vacuum Pump Cost in 2026?

Used units typically range from $15,000 to $25,000 in 2026, depending on age and service history. Refurbished models (with OEM-certified rebuilds) start at $25,000–$35,000. These prices save 40–60% vs. new (Edwards lists new NVS 300s at $60k+). Caveat: Units over 10 years old may require rotor resurfacing ($2k–$5k extra) due to wear on the claw mechanism. Always verify the pump’s last maintenance date—units serviced within the past 3,000 operating hours retain 20%+ more value.

Edwards NVS 300 Specifications and Compatible Tools

Key specs: 300 m³/h pumping speed, 0.01 mbar ultimate pressure, 15 kW power draw, 480V 3-phase, 50/60 Hz. Dry design avoids oil contamination, critical for CVD tools.
Compatible tools:

• Applied Materials Centura Cluster Tool (2008–2015)
• Lam Research Endura P5000 (2010–2017)
• Tokyo Electron Pulsar HDP-CVD (2012–2018)
  Exclusion: Not compatible with Pfeiffer Vacuum DTP 600 series (part # DTP-600-480V) due to conflicting inlet port thread profiles (NVS 300 uses ISO-KF30; DTP-600 uses ISO-F 160).

What to Check Before Buying a Used Edwards NVS 300 in 2026

1. Rotor clearance: Measure gap between claw rotors with a dial gauge. Acceptable range: ≤0.1 mm. Exceeding 0.15 mm indicates excessive wear.
2. Vacuum integrity: Run a helium leak test at 10⁻⁶ mbar·l/s threshold. Use a residual gas analyzer (RGA) to confirm no outgassing.
3. Motor insulation resistance: Test with a megohmmeter. Minimum 100 MΩ at 500V DC; <50 MΩ rejects (indicates moisture/damage).