Used Edwards NVS 300 Dry Vacuum Pump

Name: Used Edwards NVS 300 Dry Vacuum Pump
Brand: Edwards Vacuum

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Edwards NVS 300 Dry Vacuum Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Edwards NVS 300 Dry Vacuum Pump cost in 2026?

Pricing for used Used Edwards NVS 300 Dry Vacuum Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Edwards Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Edwards NVS 300 Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Edwards NVS 300 Specifications and Compatible Tools

Key specs: 300 m³/h pumping speed, 0.01 mbar ultimate pressure, 15 kW power draw, 480V 3-phase, 50/60 Hz. Dry design avoids oil contamination, critical for CVD tools.
Compatible tools:

Applied Materials Centura Cluster Tool (2008–2015)
Lam Research Endura P5000 (2010–2017)
Tokyo Electron Pulsar HDP-CVD (2012–2018)
Exclusion: Not compatible with Pfeiffer Vacuum DTP 600 series (part # DTP-600-480V) due to conflicting inlet port thread profiles (NVS 300 uses ISO-KF30; DTP-600 uses ISO-F 160).

What to Check Before Buying a Used Edwards NVS 300 in 2026

Rotor clearance: Measure gap between claw rotors with a dial gauge. Acceptable range: ≤0.1 mm. Exceeding 0.15 mm indicates excessive wear.
Vacuum integrity: Run a helium leak test at 10⁻⁶ mbar·l/s threshold. Use a residual gas analyzer (RGA) to confirm no outgassing.
Motor insulation resistance: Test with a megohmmeter. Minimum 100 MΩ at 500V DC; <50 MΩ rejects (indicates moisture/damage).