Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks

Name: Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks
Brand: Edwards Vacuum
SKU: nXDS6i
Availability: InStock

Part No. nXDS6i

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks cost in 2026?

Pricing for used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Edwards Vacuum Vacuum vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Edwards nXDS6i Scroll Pump Cost in 2026?

Used nXDS6i pumps (pre-2018 manufacture) range from $5,000–$8,000 in 2026, depending on operating hours and seal condition. Refurbished units (2018–2022 vintage) cost $8,000–$12,000, with 40–60% savings vs new OEM pricing ($20,000–$25,000). Units with >5,000 cumulative operating hours see a 20% price discount but require seal replacement. Note: Pumps with >10 years of service life often exhibit scroll vane wear exceeding 0.1mm, reducing vacuum hold time below 10⁻³ Torr.

Edwards nXDS6i Specifications and Compatible Tools

Key specs: 6 m³/hr flow rate, 10⁻³ Torr base pressure, 1.1 kW power draw, 230V AC, 50/60 Hz. Compatible with:

AMAT Centura 300mm DPS II (2005–2012)
AMAT Centura 300mm DPS III (2010–2015)
Lam Research P5i Load Locks (2013–2018)
KLA eDR-7200 Defect Review Systems (2016–2021)
Exclusion: Not compatible with AMAT Centura 200mm DPS (part #5551-0010) due to incompatible pressure sensor port (NPT vs. ISO-KF). Verify tool’s vacuum interlock protocol before installation.

What to Check Before Buying a Used nXDS6i in 2026

Oil Contamination: Use a UV lamp to inspect scroll chamber for residue. Reject if >trace oil is visible.
Insulation Resistance: Measure with a megohmmeter; must exceed 100 MΩ at 500V DC.
Flow Rate Test: Connect to a calibrated flow meter;