Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks

Name: Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks
Brand: Edwards Vacuum
SKU: nXDS6i
Price: 3950 USD

Part No. nXDS6i

Market Price

→ Stable

5 active listings

$3K–$8K

Typical secondary market pricing · USD

Low $3,150Avg $3,950High $7,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $3K – $8K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market price (observed)

$3,150 to $7,500

5 listings · last checked Sep 11, 2026 · asking prices, not sold

Source: ebay

Get an exact quote →parts@caladansemi.com

How much does a used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks cost in 2026?

A used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks from Edwards Vacuum typically sells for $3k – $8k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Edwards Vacuum Vacuum vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Edwards nXDS6i Scroll Pump (nXDS6i) for AMAT Centura Load Locks from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Edwards nXDS6i Specifications and Compatible Tools

Key specs: 6 m³/hr flow rate, 10⁻³ Torr base pressure, 1.1 kW power draw, 230V AC, 50/60 Hz. Compatible with:

AMAT Centura 300mm DPS II (2005–2012)
AMAT Centura 300mm DPS III (2010–2015)
Lam Research P5i Load Locks (2013–2018)
KLA eDR-7200 Defect Review Systems (2016–2021)
Exclusion: Not compatible with AMAT Centura 200mm DPS (part #5551-0010) due to incompatible pressure sensor port (NPT vs. ISO-KF). Verify tool’s vacuum interlock protocol before installation.

What to Check Before Buying a Used nXDS6i in 2026

Oil Contamination: Use a UV lamp to inspect scroll chamber for residue. Reject if >trace oil is visible.
Insulation Resistance: Measure with a megohmmeter; must exceed 100 MΩ at 500V DC.
Flow Rate Test: Connect to a calibrated flow meter;