Used KLA 2351 Wafer Inspection System

Name: Used KLA 2351 Wafer Inspection System
Brand: KLA-Tencor

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used KLA 2351 Wafer Inspection System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used KLA 2351 Wafer Inspection System cost in 2026?

Pricing for used Used KLA 2351 Wafer Inspection System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used KLA-Tencor Systems & Tools vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used KLA 2351 Wafer Inspection System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

KLA 2351 Specifications and Compatible Tools

Key specs: 200mm wafer capacity, 0.18µm–0.09µm node sensitivity, 12kV electron beam acceleration, 1.5m³/min vacuum flow, 24VDC/1.2kW power draw. Compatible with KLA 2135 (2001–2007), Applied Materials Centura CD-SEM (2003–2008), and Lam Research P5i Etcher (2005–2010). Warning: Incompatible with TSMC’s NT3E tools (part #TSMC-NT3E-04) due to conflicting vacuum interface protocols. Verify sensor firmware v4.3+ for 200mm-to-300mm hybrid fab integration.

What to Check Before Buying a Used KLA 2351 in 2026

Calibration logs: Ensure last NIST-traceable calibration was ≤2 years ago; reject units with >5µm stage drift.
Vacuum integrity: Test with a helium mass spectrometer; leaks >1×10⁻⁸ mbar·L/s require pump replacement.
Sensor health: Run a 3σ defect detection test on a 0.1µm test wafer; <95% capture rate indicates lens degradation.
Power supply stability: Use a Fluke 434 II to confirm <2% voltage ripple on 24VDC lines.
Tool lifecycle: Avoid systems with >25,000 cumulative wafer scans without a full sensor rebuild.