KLA-Tencor
Used KLA 2351 Wafer Inspection System
KLA-Tencor
Used KLA 2351 Wafer Inspection System
Market Price
→ Stable$30K–$150K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used KLA 2351 Wafer Inspection System
Price history and market activity data is being compiled.
How much does a used Used KLA 2351 Wafer Inspection System cost in 2026?
A used Used KLA 2351 Wafer Inspection System from KLA-Tencor typically sells for $30k – $150k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used KLA-Tencor Systems & Tools vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used KLA 2351 Wafer Inspection System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used KLA 2351 Wafer Inspection System Cost in 2026?
Used systems typically range from $1.2M to $1.8M in 2026, depending on calibration history and sensor upgrades. Refurbished units with recent lens overhauls and 2020+ production cycles save ~65% vs new KLA-Tencor equivalents (~$3.5M MSRP). Systems lacking a 2023+ vacuum pump retrofit may add $150k–$250k to the base price. Caveat: Units with >15 years of operational age (pre-2009 deployment) often require $50k–$100k in controller board replacements.
KLA 2351 Specifications and Compatible Tools
Key specs: 200mm wafer capacity, 0.18µm–0.09µm node sensitivity, 12kV electron beam acceleration, 1.5m³/min vacuum flow, 24VDC/1.2kW power draw. Compatible with KLA 2135 (2001–2007), Applied Materials Centura CD-SEM (2003–2008), and Lam Research P5i Etcher (2005–2010). Warning: Incompatible with TSMC’s NT3E tools (part #TSMC-NT3E-04) due to conflicting vacuum interface protocols. Verify sensor firmware v4.3+ for 200mm-to-300mm hybrid fab integration.
What to Check Before Buying a Used KLA 2351 in 2026
- Calibration logs: Ensure last NIST-traceable calibration was ≤2 years ago; reject units with >5µm stage drift.
- Vacuum integrity: Test with a helium mass spectrometer; leaks >1×10⁻⁸ mbar·L/s require pump replacement.
- Sensor health: Run a 3σ defect detection test on a 0.1µm test wafer; <95% capture rate indicates lens degradation.
- Power supply stability: Use a Fluke 434 II to confirm <2% voltage ripple on 24VDC lines.
- Tool lifecycle: Avoid systems with >25,000 cumulative wafer scans without a full sensor rebuild.
FAQ
Q: Is the KLA 2351 compatible with 300mm wafers?
A: No. It’s designed for 200mm wafers only. 300mm upgrades require a full system overhaul ($500k+).
Q: How does the 2351 compare to the KLA 2450?
A: The 2450 offers
Recent Market Listings
Updated May 19$25,500
As-is$66,000
Used$114,000
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $25,500 | As-is | May 12, 2026 |
| Ask | $66,000 | Used | May 5, 2026 |
| Ask | $114,000 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $30K – $150K
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