Lam Research 2300 Flex Etch System

Name: Lam Research 2300 Flex Etch System
Brand: Lam Research

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 2300 Flex Etch System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 2300 Flex Etch System cost in 2026?

Pricing for used Lam Research 2300 Flex Etch System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Etch Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 2300 Flex Etch System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam 2300 Flex Etch System Specifications and Compatible Tools

Key specs: 1.5–2.5 kW RF power, 10–100 mTorr chamber pressure, 0.1–5 sccm gas flow precision. Compatible with AMAT Centura 5500 (1999–2002), Hitachi TMA 3000 (2000–2003), and Lam 2300 Versa (1998–2001). Warning: Incompatible with Lam 2300 HiSilicon models post-2001 due to differing RF matching networks (part number LAM-RF-23H-01). Verify ICP source compatibility for CF₄/CHF₃ chemistries.

What to Check Before Buying a Used Lam 2300 Flex Etch System in 2026

Process cycle count: Reject units >20,000 cycles without full cathode replacement (check PLC logs).
RF power calibration: Use a vector network analyzer (e.g., Keysight N5242A) to confirm <2% deviation from rated output.
Leak rate: Perform helium mass spectrometer test (<1×10⁻⁹ std cm/s acceptable; >5×10⁻⁹ mandates vacuum pump rebuild).
Gas valve wear: Disassemble and measure orifice erosion with a micrometer (>