Lam Research 2300 Flex Etch System

Name: Lam Research 2300 Flex Etch System
Brand: Lam Research
Price: 354000 USD
Availability: InStock

Market Price

→ Stable

1 active listing

$301K–$407K

Typical secondary market pricing · USD

Low $301,000Avg $354,000High $407,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $301K – $407K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 2300 Flex Etch System cost in 2026?

A used Lam Research 2300 Flex Etch System from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Etch Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 2300 Flex Etch System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam 2300 Flex Etch System Cost in 2026?

Used systems price between $301,000–$350,000, while refurbished units with upgraded RF modules and gas valves range from $350,000–$407,000. This represents 85–88% savings versus new equivalents priced above $2.2M in 2026. Caveat: Units with >15,000 process cycles (common in 200mm high-volume manufacturing) may require cathode replacement, reducing effective value by 12–15%.

Lam 2300 Flex Etch System Specifications and Compatible Tools

Key specs: 1.5–2.5 kW RF power, 10–100 mTorr chamber pressure, 0.1–5 sccm gas flow precision. Compatible with AMAT Centura 5500 (1999–2002), Hitachi TMA 3000 (2000–2003), and Lam 2300 Versa (1998–2001). Warning: Incompatible with Lam 2300 HiSilicon models post-2001 due to differing RF matching networks (part number LAM-RF-23H-01). Verify ICP source compatibility for CF₄/CHF₃ chemistries.

What to Check Before Buying a Used Lam 2300 Flex Etch System in 2026

Process cycle count: Reject units >20,000 cycles without full cathode replacement (check PLC logs).
RF power calibration: Use a vector network analyzer (e.g., Keysight N5242A) to confirm <2% deviation from rated output.
Leak rate: Perform helium mass spectrometer test (<1×10⁻⁹ std cm/s acceptable; >5×10⁻⁹ mandates vacuum pump rebuild).
Gas valve wear: Disassemble and measure orifice erosion with a micrometer (>