Lam Research
Lam 2300 Versys Etch Chamber Parts
Lam Research
Lam 2300 Versys Etch Chamber Parts
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Lam 2300 Versys Etch Chamber Parts moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Lam 2300 Versys Etch Chamber Parts cost in 2026?
Pricing for used Lam 2300 Versys Etch Chamber Parts units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Lam Research Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam 2300 Versys Etch Chamber Parts from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Lam 2300 Versys Etch Chamber Specifications and Compatible Tools
Key specs: 5kW RF power handling, 1–50 mTorr operating pressure, 200–480V AC input, 13.56 MHz RF frequency. Compatible with:
- Lam 2300 Versys 2300i/2300ii (2010–2015 production)
- Kiyo X200 Etch (2012–2018 models)
- Alliance EX5 (2014–2020 variants)
Exclusion: Not compatible with Symphony Etch tools (part # 2300-SYM-ETCH) due to RF matching circuit differences. Cross-check the chamber’s serial prefix (e.g., VC-23i-xxxx) against tool schematics.
What to Check Before Buying a Used Lam 2300 Versys Etch Chamber in 2026
- Cycle count: Reject parts >15,000 cycles (Lam’s threshold for recoating). Use the chamber’s PLC to export cycle logs.
- Pitting inspection: Visually scan electrode surfaces under 5× magnification; >3 pitting defects/mm² indicates plasma instability.
- Vacuum integrity: Test leak rate with a helium mass spectrometer; must achieve <1×10⁻⁸ mbar·L/s.
- Electrical continuity: Measure RF coil resistance with a low-ohm meter; >0.1 Ω deviation from OEM spec (0.05–0
Recent Market Listings
Updated Sep 30No recent market activity for Lam 2300 Versys Etch Chamber Parts.
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