Lam 2300 Versys Etch Chamber Parts

Name: Lam 2300 Versys Etch Chamber Parts
Brand: Lam Research
Price: 354000 USD
Availability: InStock

Market Price

→ Stable

$301K–$407K

Typical secondary market pricing · USD

Low $301,000Avg $354,000High $407,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $301K – $407K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam 2300 Versys Etch Chamber Parts cost in 2026?

A used Lam 2300 Versys Etch Chamber Parts from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam 2300 Versys Etch Chamber Parts from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam 2300 Versys Etch Chamber Cost in 2026?

Used units price between $301,000–$365,000, while refurbished models range $375,000–$407,000. New OEM parts exceed $625,000, offering 36–52% savings with used/refurbished options. Caveat: Chambers with >15,000 process cycles (per Lam’s spec sheet) risk plasma uniformity degradation, requiring costly recoating. Always verify cycle count via the part’s embedded PLC log.

Lam 2300 Versys Etch Chamber Specifications and Compatible Tools

Key specs: 5kW RF power handling, 1–50 mTorr operating pressure, 200–480V AC input, 13.56 MHz RF frequency. Compatible with:

Lam 2300 Versys 2300i/2300ii (2010–2015 production)
Kiyo X200 Etch (2012–2018 models)
Alliance EX5 (2014–2020 variants)
Exclusion: Not compatible with Symphony Etch tools (part # 2300-SYM-ETCH) due to RF matching circuit differences. Cross-check the chamber’s serial prefix (e.g., VC-23i-xxxx) against tool schematics.

What to Check Before Buying a Used Lam 2300 Versys Etch Chamber in 2026

Cycle count: Reject parts >15,000 cycles (Lam’s threshold for recoating). Use the chamber’s PLC to export cycle logs.
Pitting inspection: Visually scan electrode surfaces under 5× magnification; >3 pitting defects/mm² indicates plasma instability.
Vacuum integrity: Test leak rate with a helium mass spectrometer; must achieve <1×10⁻⁸ mbar·L/s.
Electrical continuity: Measure RF coil resistance with a low-ohm meter; >0.1 Ω deviation from OEM spec (0.05–0