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Lam Research

Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part

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Lam Research

Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part

Name: Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part
Brand: Lam Research
SKU: 716-094876-001
Availability: InStock

Part No. 716-094876-001

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part cost in 2026?

Pricing for used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-094876-001 Cost in 2026?

Used units range from $12,500–$15,000 in 2026, depending on cycle count (≤4,500 preferred). Refurbished variants (with new quartz bonding and plasma seals) cost $18,000–$20,000, saving 40–50% vs. new OEM pricing (~$25,000). Caveat: Liners with >5,000 process cycles show 3× higher particle excursions during seasoning. Always verify cycle logs from the original tool’s PM history.

Lam Research 716-094876-001 Specifications and Compatible Tools

Material: Synthetic fused silica (99.99% purity)
Max Temp: 350°C | Max Pressure: 10 Torr | ID: 305mm ±0.1mm
Compatible Tools:
- Lam Versys M1 (2005–2008)
- Lam Versys M2 (2007–2010)
- Lam Versys M3 (2009–2012)
Exclusion: Not compatible with Versys M4 (part 716-094876-002 required due to revised flange O-ring ports).

What to Check Before Buying a Used Lam Research 716-094876-001 in 2026

Crack Inspection: Use 5× magnifier; reject if microcracks exceed 0.2mm depth (measured via laser profilometer).
Thickness Check: Minimum wall thickness must be ≥8.2mm (per ISO 19419; use digital micrometer at 4+ points).
Particle Test: Run 1-hour Cl₂ plasma at 500W; stop if >200 particles ≥0.3µm detected (per SEMI E10).
Cycle Count: Reject parts with >4,500 cycles (tool logs must show ≤4,500; older than 2018 models risk quartz fatigue).
Bonding Integrity: Thermally shock in liquid nitrogen (-196°C) to 300°C; no delamination in bonding seams.

FAQ

Q: Is used Lam 716-094876-001 better than refurbished?
A: Used parts with <4,500 cycles are cost-effective if verified. Refurbished adds new seals and bonding but costs 50% more.

Q: Does 716-094876-001 fit Lam Versys M3 2009?
A: Yes. Confirmed fit for Versys M3 (2009–2012).

Q: How to test for hidden cracks?
A: Use UV fluorescence penetrant (ASTM E1444) or eddy current scanner; rejects parts with subsurface flaws.