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Lam Research

Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part

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Lam Research

Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part

Name: Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part
Brand: Lam Research
SKU: 716-094876-001

Part No. 716-094876-001

Market Price

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Our sourcing team will find pricing within 4 hours

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part cost in 2026?

Pricing for used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-094876-001 Quartz Chamber Liner for Versys Metal 200mm - Replacement Part from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 716-094876-001 Specifications and Compatible Tools

Material: Synthetic fused silica (99.99% purity)
Max Temp: 350°C | Max Pressure: 10 Torr | ID: 305mm ±0.1mm
Compatible Tools:
- Lam Versys M1 (2005–2008)
- Lam Versys M2 (2007–2010)
- Lam Versys M3 (2009–2012)
Exclusion: Not compatible with Versys M4 (part 716-094876-002 required due to revised flange O-ring ports).

What to Check Before Buying a Used Lam Research 716-094876-001 in 2026

Crack Inspection: Use 5× magnifier; reject if microcracks exceed 0.2mm depth (measured via laser profilometer).
Thickness Check: Minimum wall thickness must be ≥8.2mm (per ISO 19419; use digital micrometer at 4+ points).
Particle Test: Run 1-hour Cl₂ plasma at 500W; stop if >200 particles ≥0.3µm detected (per SEMI E10).
Cycle Count: Reject parts with >4,500 cycles (tool logs must show ≤4,500; older than 2018 models risk quartz fatigue).
Bonding Integrity: Thermally shock in liquid nitrogen (-196°C) to 300°C; no delamination in bonding seams.

FAQ

Q: Is used Lam 716-094876-001 better than refurbished?
A: Used parts with <4,500 cycles are cost-effective if verified. Refurbished adds new seals and bonding but costs 50% more.

Q: Does 716-094876-001 fit Lam Versys M3 2009?
A: Yes. Confirmed fit for Versys M3 (2009–2012).

Q: How to test for hidden cracks?
A: Use UV fluorescence penetrant (ASTM E1444) or eddy current scanner; rejects parts with subsurface flaws.