716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research)

Name: 716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research)
Brand: Lam Research
SKU: 716-011638-001

Part No. 716-011638-001

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research) cost in 2026?

Pricing for used 716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

716-011638-001 Specifications and Compatible Tools

Material: High-purity silicon (Si) with borosilicate glass bonding layer
Dimensions: 300mm OD × 45mm thickness
RF Power Handling: Up to 5kW continuous (13.56MHz)
Operating Temp: -5°C to 120°C

Compatible Tools:

Lam 2300 Kiyo (2005–2012 production)
Lam 2300 Kiyo45 (2010–2015 production)

Compatibility Warning: Do not install on systems requiring 716-011638-002 (revised RF port spacing). Use a 3D scan or compare part number etching on the ring’s base.

What to Check Before Buying a Used 716-011638-001 in 2026

RF-Hour Threshold: Reject units with >40,000 cumulative RF-hours (check HMI logs or PM records).
Surface Integrity: Use a profilometer to measure erosion depth on the silicon face—anything >0.5mm requires rework.
Electrical Continuity: Test with a multimeter (4-wire method); resistance must be <0.1Ω between RF pins.
Thermal Cycling: Units with >15,000 thermal cycles (ΔT >80°C) risk delamination; inspect bonding layer with a 10x loupe.
Lam Part Markings: Verify laser-etched part number (716-011638-001) and absence of “Rev B” stamps (which denote incompatible revisions).

Q: Is this part compatible with Lam 2300 Kiyo45 systems from 2015?
A: Yes, but confirm the