Lam Research
Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement
Lam Research
Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement
Part No. 716-078234-001
Market Price
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Market Data
Coming Soon for Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement
Price history and market activity data is being compiled.
How much does a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement cost in 2026?
Pricing for used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.
Used Lam Research Process Kit vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 716-078234-001 Cost in 2026?
Used units range from $1,200–$1,800 in 2026, depending on cycle count and surface erosion. Refurbished variants (with plasma-facing layer replacement) cost $2,500–$3,000, saving 40–60% vs. new ($5,000–$6,500). Parts with >5,000 process cycles may require derating due to micro-crack propagation risks. Always verify the erosion depth (spec: ≤0.5mm) before purchase.
Lam Research 716-078234-001 Specifications and Compatible Tools
This 200mm silicon focus ring operates at 13.56MHz RF, 10–50mTorr pressure, and 1,500–3,500W forward power. Compatible with:
- Lam TCP 9600 G3 (2008–2012, 64-chamber variants)
- Lam TCP 9600 G2 (2005–2007, 32-chamber variants)
- Lam Centura DSiE (2010–2014, with 716-078234-001 adapter kit)
Incompatible with: Lam TCP 9400 (part 716-078234-002 required due to 230mm diameter). Verify chamber RF matching network calibration before installation.
What to Check Before Buying a
Recent Market Listings
Updated May 19No recent market activity for Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement.
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Quick Info
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