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Lam Research

Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement

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Lam Research

Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement

Part No. 716-078234-001

Market Price

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Available by Request
Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement cost in 2026?

Pricing for used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2–6 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2–6 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-078234-001 Cost in 2026?

Used units range from $1,200–$1,800 in 2026, depending on cycle count and surface erosion. Refurbished variants (with plasma-facing layer replacement) cost $2,500–$3,000, saving 40–60% vs. new ($5,000–$6,500). Parts with >5,000 process cycles may require derating due to micro-crack propagation risks. Always verify the erosion depth (spec: ≤0.5mm) before purchase.

Lam Research 716-078234-001 Specifications and Compatible Tools

This 200mm silicon focus ring operates at 13.56MHz RF, 10–50mTorr pressure, and 1,500–3,500W forward power. Compatible with:

  • Lam TCP 9600 G3 (2008–2012, 64-chamber variants)
  • Lam TCP 9600 G2 (2005–2007, 32-chamber variants)
  • Lam Centura DSiE (2010–2014, with 716-078234-001 adapter kit)
    Incompatible with: Lam TCP 9400 (part 716-078234-002 required due to 230mm diameter). Verify chamber RF matching network calibration before installation.

What to Check Before Buying a

Recent Market Listings

Updated May 19

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit

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