Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement

Name: Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement
Brand: Lam Research
SKU: 716-078234-001

Part No. 716-078234-001

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement cost in 2026?

Pricing for used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 716-078234-001 Specifications and Compatible Tools

This 200mm silicon focus ring operates at 13.56MHz RF, 10–50mTorr pressure, and 1,500–3,500W forward power. Compatible with:

Lam TCP 9600 G3 (2008–2012, 64-chamber variants)
Lam TCP 9600 G2 (2005–2007, 32-chamber variants)
Lam Centura DSiE (2010–2014, with 716-078234-001 adapter kit)
Incompatible with: Lam TCP 9400 (part 716-078234-002 required due to 230mm diameter). Verify chamber RF matching network calibration before installation.