Lam Research
716-098765-001 — Electrostatic Chuck, 300mm (Lam Research)
Lam Research
716-098765-001 — Electrostatic Chuck, 300mm (Lam Research)
Part No. 716-098765-001
Market Price
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Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
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Pricing
Price on request — quote in 4 hours
Market pricing for 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) cost in 2026?
Pricing for used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
716-098765-001 Specifications and Compatible Tools
This 300mm electrostatic chuck operates at 5 kV DC, 1.2 kW power draw, and 15 N/cm² clamping force. Frequency response: 1–10 kHz for wafer release. Compatible with Lam 2300 Exe (2003–2008), 2300 Exe II (2009–2014), and 2300 Exe III (2015–2019). Exclusion: Not compatible with Lam 2300 Exe IV (2020–2023) due to revised part number 716-098765-004. Verify tool serial number prefixes: Exe III uses "L23-3A", Exe IV uses "L23-4B".
What to Check Before Buying a Used 716-098765-001 in 2026
- Dielectric integrity: Use a high-voltage megohmmeter; resistance must exceed 10 GΩ at 5 kV. Fail if <8 GΩ.
- Corona electrode wear: Measure electrode thickness with a micrometer; reject if <0.3 mm (original spec: 0.5 mm).
- Clamping force decay: Test with a digital load cell; output must exceed 14 N/cm² (spec: 15 N/cm²).
- Wafer release time: Time release at 10 kV discharge; >3 seconds indicates electrode degradation.
- Firmware version: Units with firmware pre-2018 lack thermal shutdown; incompatible with 2300 Exe III.
FAQ
Q: Is used 716-098765-001 reliable for high-volume production?
A: Yes, if <8 years old and with <50,000 operational cycles. Refurbished units are preferred for 24/7
Recent Market Listings
Updated Sep 30No recent market activity for 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research).
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