716-098765-001 — Electrostatic Chuck, 300mm (Lam Research)

Name: 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research)
Brand: Lam Research
SKU: 716-098765-001
Availability: InStock

Part No. 716-098765-001

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Last verified: 2026-05-11

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) cost in 2026?

Pricing for used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 716-098765-001 — Electrostatic Chuck, 300mm (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 716-098765-001 Cost in 2026?

Used units range from $15,000 to $25,000 in 2026, while refurbished models cost $25,000 to $35,000. New OEM parts from Lam Research exceed $60,000, offering 40–60% savings for used and 20–30% savings for refurbished. Caveat: Units with >10 years of operational history require derating—expect a 15% price discount but a 20% performance degradation in clamping efficiency. Refurbished parts include voltage recalibration and corona electrode replacement; verify <5% deviation in dielectric testing.

716-098765-001 Specifications and Compatible Tools

This 300mm electrostatic chuck operates at 5 kV DC, 1.2 kW power draw, and 15 N/cm² clamping force. Frequency response: 1–10 kHz for wafer release. Compatible with Lam 2300 Exe (2003–2008), 2300 Exe II (2009–2014), and 2300 Exe III (2015–2019). Exclusion: Not compatible with Lam 2300 Exe IV (2020–2023) due to revised part number 716-098765-004. Verify tool serial number prefixes: Exe III uses "L23-3A", Exe IV uses "L23-4B".

What to Check Before Buying a Used 716-098765-001 in 2026

Dielectric integrity: Use a high-voltage megohmmeter; resistance must exceed 10 GΩ at 5 kV. Fail if <8 GΩ.
Corona electrode wear: Measure electrode thickness with a micrometer; reject if <0.3 mm (original spec: 0.5 mm).
Clamping force decay: Test with a digital load cell; output must exceed 14 N/cm² (spec: 15 N/cm²).
Wafer release time: Time release at 10 kV discharge; >3 seconds indicates electrode degradation.
Firmware version: Units with firmware pre-2018 lack thermal shutdown; incompatible with 2300 Exe III.

FAQ

Q: Is used 716-098765-001 reliable for high-volume production?
A: Yes, if <8 years old and with <50,000 operational cycles. Refurbished units are preferred for 24/7