716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research)

Name: 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research)
Brand: Lam Research
SKU: 716-108484-001
Price: 354000 USD
Availability: InStock

Part No. 716-108484-001

Market Price

→ Stable

$301K–$407K

Typical secondary market pricing · USD

Low $301,000Avg $354,000High $407,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $301K – $407K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) cost in 2026?

A used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 716-108484-001 Cost in 2026?

Used units in 2026 range from $301,000–$350,000, while refurbished (with ceramic and RF coil replacement) cost $360,000–$407,000. New OEM list price remains around $700,000, offering 50–70% savings with used/refurbished options. Units with >40,000 RF-hours may exceed $407,000 due to limited service life. Price variance depends on ceramic wear, coil integrity, and prior exposure to corrosive gases. Units with <20,000 RF-hours and full gas flow calibration (500 sccm ±5%) command the upper end of the range.

716-108484-001 Specifications and Compatible Tools

Key specs: 5kW RF power handling, 13.56 MHz frequency, 10kV max voltage, and 500 sccm gas flow. Compatible with Lam 2300 Flex D (2008–2015) and Lam 2300 Versys Flex (2012–2018). Warning: Not compatible with 2300 Versys MxP models using part number 716-108484-002. Verify ceramic insulation thickness (≥1.2mm) and RF connector type (N-type, 50Ω). Units require matching 716-108485-001 lower electrode.

What to Check Before Buying a Used 716-108484-001 in 2026

RF-hour count: Reject units with >30,000 hours (check LamCare logs).
Ceramic insulation: Use a megohmmeter to verify ≥10^12 Ω resistance at 5kV DC. Cracks >0.2mm invalidate use.
Gas flow calibration: Test with a Mass Flow Controller (MFC); deviation >5% from 500 sccm requires recalibration.
Thermal cycling history: Units with >1,500 cycles (2026 industry average) show accelerated wear.
RF coil continuity: Use a LCR meter to confirm inductance within 1.2–1.4 μH (±5%).

Q: Is 716-108484-001 refurbished better than used in 2026?
A: Refurbished units (replaced ceramics and coils) last 1.5× longer than used, but cost 20% more. Choose used if <20,000 RF-hours.

Q: Will 716-108484-001 fit a 2300 Versys Flex?
A: Yes, but only models pre-2016. Post-2016 Versys Flex requires 716-108484-002.

Q: How often should I inspect a used 716-108484-001?
A: Every 5,000 RF-hours or 6 months, whichever comes first. Focus on ceramic and gas port erosion.

Q: What’s the 2026 lead time for this part?
A: 2–4 weeks after sourcing, but delays occur if ceramic replacement is needed.