716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research)

Name: 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research)
Brand: Lam Research
SKU: 716-108484-001

Part No. 716-108484-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) cost in 2026?

Pricing for used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 716-108484-001 — Upper Electrode Assembly, 300mm (2300 Flex D) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

716-108484-001 Specifications and Compatible Tools

Key specs: 5kW RF power handling, 13.56 MHz frequency, 10kV max voltage, and 500 sccm gas flow. Compatible with Lam 2300 Flex D (2008–2015) and Lam 2300 Versys Flex (2012–2018). Warning: Not compatible with 2300 Versys MxP models using part number 716-108484-002. Verify ceramic insulation thickness (≥1.2mm) and RF connector type (N-type, 50Ω). Units require matching 716-108485-001 lower electrode.

What to Check Before Buying a Used 716-108484-001 in 2026

RF-hour count: Reject units with >30,000 hours (check LamCare logs).
Ceramic insulation: Use a megohmmeter to verify ≥10^12 Ω resistance at 5kV DC. Cracks >0.2mm invalidate use.
Gas flow calibration: Test with a Mass Flow Controller (MFC); deviation >5% from 500 sccm requires recalibration.
Thermal cycling history: Units with >1,500 cycles (2026 industry average) show accelerated wear.
RF coil continuity: Use a LCR meter to confirm inductance within 1.2–1.4 μH (±5%).

Q: Is 716-108484-001 refurbished better than used in 2026?
A: Refurbished units (replaced ceramics and coils) last 1.5× longer than used, but cost 20% more. Choose used if <20,000 RF-hours.

Q: Will 716-108484-001 fit a 2300 Versys Flex?
A: Yes, but only models pre-2016. Post-2016 Versys Flex requires 716-108484-002.

Q: How often should I inspect a used 716-108484-001?
A: Every 5,000 RF-hours or 6 months, whichever comes first. Focus on ceramic and gas port erosion.

Q: What’s the 2026 lead time for this part?
A: 2–4 weeks after sourcing, but delays occur if ceramic replacement is needed.