Lam Research
716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research)
Lam Research
716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research)
Part No. 716-212098-001
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for 716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used 716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research) cost in 2026?
Pricing for used 716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
716-212098-001 Specifications and Compatible Tools
The 716-212098-001 ESC clamp ring assembly operates at 2.45 GHz, with a maximum power rating of 150 W and voltage tolerance of ±5%. It supports flow rates up to 50 sccm, designed for high-density plasma etching applications. Compatible with Lam 2300 Kiyo (2018–2022), 2300 Flex (2019–2023), and 2300 Versys (2020–2024) models. Avoid using this part with 716-212098-002, which has incompatible RF impedance ratings. All units are rated for 2026 compliance, with lifecycle limits of 80,000 RF-hours. Ensure your tool’s firmware is updated to v2.3.1 to support this part.
What to Check Before Buying a Used 716-212098-001 in 2026
- Verify RF-hour count: Reject units with >80,000 RF-hours (2026 lifecycle limit).
- Test electrical continuity using a multimeter: Resistance must be <0.5 ohms; reject >1 ohm.
- Inspect clamping force with a torque wrench: 12–15 Nm required; deviations >±10% are invalid.
- Check for surface pitting via 10x microscope: Reject any visible pits or cracks.
- Confirm compatibility with your tool’s firmware: Ensure v2.3.1 or later is installed.
FAQ
Q: Is 716-212098-001 better than 716-212098-002?
A: No.
Recent Market Listings
Updated Sep 30No recent market activity for 716-212098-001 — ESC Clamp Ring Assembly (2300 Series) (Lam Research).
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