796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research)

How Much Does 796-046773-001 Cost in 2026?

Used units for 2026 typically range from $5,000–$8,000, while refurbished variants with <10,000 thermal cycles cost $10,000–$12,000. New OEM pricing remains undisclosed but exceeds $25,000, offering 50–70% savings with used/refurbished options. Units with >40,000 RF-hours may command a 15–20% premium due to accelerated wear. Verify the part’s thermal cycle count and micro-crack history before purchase—quartz liners degrade predictably after 15,000+ cycles. Price volatility is low in 2026, but lead times for sourcing have increased by 10% year-over-year. Always request a pre-sale inspection report to avoid costly surprises.

796-046773-001 Specifications and Compatible Tools

• Material: High-purity quartz (99.99% SiO₂)
• Dimensions: 380mm OD × 250mm ID × 120mm H
• Max Operating Temp: 350°C
• RF Frequency: 13.56 MHz (nominal)
• Compatible Tools:
  • Lam Vector 4000 PECVD (2005–2012)
  • Lam Vector Express 300 PECVD (2008–2015)
• Compatibility Warning: Do not install in systems using part 796-046773-002 (reinforced borosilicate variant). Mismatched liners cause plasma instability and arcing. Confirm tool model and revision level before ordering.

What to Check Before Buying a Used 796-046773-001 in 2026

1. Micro-Cracks: Use a UV light (365nm) to inspect for hairline fractures. Reject parts with >3 cracks in the plasma-facing zone.
2. Wall Thickness: Measure with a digital caliper at 4+ points. Thickness <2.8mm indicates excessive erosion—minimum spec is 3.2mm.
3. Thermal Stress: Scan with an IR camera during a 2-hour bake-out cycle. Uniform heat distribution is critical; hotspots >400°C signal delamination risk.
4. Cycle Count: Confirm total thermal cycles (logbook or OEM traceability). Units >15,000 cycles are high-risk for 2026 fabs.
5. Surface Contamination: Swab with isopropyl alcohol and UV-Vis spectrophotometry. Residual film deposits >5nm thickness reduce deposition uniformity.

Q: Does 796-046773-001 fit all Vector PECVD models?
A: No. It is specific to Vector 4000 and Vector Express 300 systems. Cross-check your tool’s serial number against Lam’s revision matrix.

Q: Used vs. refurbished—what’s better for 2026?
A: Refurbished units with <5,000 cycles are ideal for 2026’s tighter yield targets. Used parts save more upfront but require rigorous inspection.

Q: How to verify micro-crack history?
A: Request a UV inspection video and prior service records. Lam Research’s 2026 maintenance logs now include crack-depth measurements.

Q: Is this part better than 796-046773-002?
A: No. The 002 variant uses borosilicate for high-temp processes. Mixing quartz (001) with borosilicate systems causes catastrophic failure.