796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research)

Name: 796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research)
Brand: Lam Research
SKU: 796-046773-001

Part No. 796-046773-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research) cost in 2026?

Pricing for used 796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 796-046773-001 — Quartz Chamber Liner, Vector PECVD (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

796-046773-001 Specifications and Compatible Tools

Material: High-purity quartz (99.99% SiO₂)
Dimensions: 380mm OD × 250mm ID × 120mm H
Max Operating Temp: 350°C
RF Frequency: 13.56 MHz (nominal)
Compatible Tools:
- Lam Vector 4000 PECVD (2005–2012)
- Lam Vector Express 300 PECVD (2008–2015)
Compatibility Warning: Do not install in systems using part 796-046773-002 (reinforced borosilicate variant). Mismatched liners cause plasma instability and arcing. Confirm tool model and revision level before ordering.

What to Check Before Buying a Used 796-046773-001 in 2026

Micro-Cracks: Use a UV light (365nm) to inspect for hairline fractures. Reject parts with >3 cracks in the plasma-facing zone.
Wall Thickness: Measure with a digital caliper at 4+ points. Thickness <2.8mm indicates excessive erosion—minimum spec is 3.2mm.
Thermal Stress: Scan with an IR camera during a 2-hour bake-out cycle. Uniform heat distribution is critical; hotspots >400°C signal delamination risk.
Cycle Count: Confirm total thermal cycles (logbook or OEM traceability). Units >15,000 cycles are high-risk for 2026 fabs.
Surface Contamination: Swab with isopropyl alcohol and UV-Vis spectrophotometry. Residual film deposits >5nm thickness reduce deposition uniformity.

Q: Does 796-046773-001 fit all Vector PECVD models?
A: No. It is specific to Vector 4000 and Vector Express 300 systems. Cross-check your tool’s serial number against Lam’s revision matrix.

Q: Used vs. refurbished—what’s better for 2026?
A: Refurbished units with <5,000 cycles are ideal for 2026’s tighter yield targets. Used parts save more upfront but require rigorous inspection.

Q: How to verify micro-crack history?
A: Request a UV inspection video and prior service records. Lam Research’s 2026 maintenance logs now include crack-depth measurements.

Q: Is this part better than 796-046773-002?
A: No. The 002 variant uses borosilicate for high-temp processes. Mixing quartz (001) with borosilicate systems causes catastrophic failure.