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Lam Research

823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)

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Lam Research

823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)

Part No. 823-035971-001

Market Price

→ Stable

$301K$407K

Typical secondary market pricing · USD

Low $301,000Avg $354,000High $407,000
Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) cost in 2026?

A used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)
Save 50-70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 823-035971-001 Cost in 2026?

Used units for 823-035971-001 range from $301,000 to $407,000 in 2026, depending on service history and wear. Refurbished options (with replaced O-rings and flow sensors) add $25,000–$40,000 to the base price. New OEM units list at $650,000–$750,000, offering 50–70% savings with used purchases. Note: Units with >40,000 RF-hours often require flow-path recertification, increasing costs by 10–15%. Market demand has softened in 2026, driving prices downward, but availability remains constrained due to Lam’s 2024 production phaseout of the 2300 Versys platform. Buyers should prioritize units with <35,000 operational hours to avoid costly rework.


823-035971-001 Specifications and Compatible Tools

This gas injector assembly operates at 20–500 sccm flow rates, with a maximum pressure rating of 15 psi and compatibility with NH3, BCl3, and WF6. Constructed with stainless steel flow paths and PTFE seals, it supports temperatures up to 250°C. Compatible tools include:

  • Lam 2300 Versys Metal (2010–2018 production)
  • Lam 2300 Versys (2012–2016 models using 823-035971-001, not 823-035972-001).
    Warning: Do not install on systems using part 823-035973-001 due to incompatible flow-path geometry. Verify tool-specific calibration logs to ensure compatibility.

What to Check Before Buying a Used 823-035971-001 in 2026

  1. Corrosion inspection: Use a borescope to check internal flow paths for pitting; reject units with >2mm depth corrosion.
  2. Orifice diameter: Measure using a digital micrometer; acceptable range is 1.2–1.3mm (spec deviation >5% invalidates calibration).
  3. Flow consistency test: Run a 24-hour test with a mass flow controller (MFC-5000 series); variation >±5% at 300 sccm requires sensor replacement.
  4. Seal integrity: Pressure-test O-rings at 10 psi for 1 hour; leakage >0.1 sccm fails the unit.
  5. Service history: Avoid units older than 8 years without documented seal replacement. Units with >30,000 hours of NH3 exposure often show accelerated wear.

Q: Is 823-035971-001 compatible with the Lam 2300 Versys Etch model?
A: No. This

Recent Market Listings

Updated May 19
AskMay 12, 2026

$255,850

As-is
AskMay 5, 2026

$332,800

Used
AskApr 28, 2026

$375,200

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
GradeB
CategoryParts & Consumables
Lead Time2-4 weeks after sourcing

Get a Quote

Market: $301K – $407K

Response within 4 hours. Export compliance handled.

Email parts@caladansemi.com

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Secondary Market

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