823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)

Name: 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)
Brand: Lam Research
SKU: 823-035971-001

Part No. 823-035971-001

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) cost in 2026?

Pricing for used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

823-035971-001 Specifications and Compatible Tools

This gas injector assembly operates at 20–500 sccm flow rates, with a maximum pressure rating of 15 psi and compatibility with NH3, BCl3, and WF6. Constructed with stainless steel flow paths and PTFE seals, it supports temperatures up to 250°C. Compatible tools include:

Lam 2300 Versys Metal (2010–2018 production)
Lam 2300 Versys (2012–2016 models using 823-035971-001, not 823-035972-001).
Warning: Do not install on systems using part 823-035973-001 due to incompatible flow-path geometry. Verify tool-specific calibration logs to ensure compatibility.

What to Check Before Buying a Used 823-035971-001 in 2026

Corrosion inspection: Use a borescope to check internal flow paths for pitting; reject units with >2mm depth corrosion.
Orifice diameter: Measure using a digital micrometer; acceptable range is 1.2–1.3mm (spec deviation >5% invalidates calibration).
Flow consistency test: Run a 24-hour test with a mass flow controller (MFC-5000 series); variation >±5% at 300 sccm requires sensor replacement.
Seal integrity: Pressure-test O-rings at 10 psi for 1 hour; leakage >0.1 sccm fails the unit.
Service history: Avoid units older than 8 years without documented seal replacement. Units with >30,000 hours of NH3 exposure often show accelerated wear.