Lam Research
823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)
Lam Research
823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)
Part No. 823-035971-001
Market Price
→ Stable$301K–$407K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-16
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research)
Price history and market activity data is being compiled.
How much does a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) cost in 2026?
A used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 823-035971-001 — Gas Injector Assembly (2300 Versys Metal) (Lam Research) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does 823-035971-001 Cost in 2026?
Used units for 823-035971-001 range from $301,000 to $407,000 in 2026, depending on service history and wear. Refurbished options (with replaced O-rings and flow sensors) add $25,000–$40,000 to the base price. New OEM units list at $650,000–$750,000, offering 50–70% savings with used purchases. Note: Units with >40,000 RF-hours often require flow-path recertification, increasing costs by 10–15%. Market demand has softened in 2026, driving prices downward, but availability remains constrained due to Lam’s 2024 production phaseout of the 2300 Versys platform. Buyers should prioritize units with <35,000 operational hours to avoid costly rework.
823-035971-001 Specifications and Compatible Tools
This gas injector assembly operates at 20–500 sccm flow rates, with a maximum pressure rating of 15 psi and compatibility with NH3, BCl3, and WF6. Constructed with stainless steel flow paths and PTFE seals, it supports temperatures up to 250°C. Compatible tools include:
- Lam 2300 Versys Metal (2010–2018 production)
- Lam 2300 Versys (2012–2016 models using 823-035971-001, not 823-035972-001).
Warning: Do not install on systems using part 823-035973-001 due to incompatible flow-path geometry. Verify tool-specific calibration logs to ensure compatibility.
What to Check Before Buying a Used 823-035971-001 in 2026
- Corrosion inspection: Use a borescope to check internal flow paths for pitting; reject units with >2mm depth corrosion.
- Orifice diameter: Measure using a digital micrometer; acceptable range is 1.2–1.3mm (spec deviation >5% invalidates calibration).
- Flow consistency test: Run a 24-hour test with a mass flow controller (MFC-5000 series); variation >±5% at 300 sccm requires sensor replacement.
- Seal integrity: Pressure-test O-rings at 10 psi for 1 hour; leakage >0.1 sccm fails the unit.
- Service history: Avoid units older than 8 years without documented seal replacement. Units with >30,000 hours of NH3 exposure often show accelerated wear.
Q: Is 823-035971-001 compatible with the Lam 2300 Versys Etch model?
A: No. This
Recent Market Listings
Updated May 19$255,850
As-is$332,800
Used$375,200
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $255,850 | As-is | May 12, 2026 |
| Ask | $332,800 | Used | May 5, 2026 |
| Ask | $375,200 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
Get a Quote
Market: $301K – $407K
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