853-011802-001 — Upper Electrode Assembly (Lam Research)

Name: 853-011802-001 — Upper Electrode Assembly (Lam Research)
Brand: Lam Research
SKU: 853-011802-001

Part No. 853-011802-001

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 853-011802-001 — Upper Electrode Assembly (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 853-011802-001 — Upper Electrode Assembly (Lam Research) cost in 2026?

Pricing for used 853-011802-001 — Upper Electrode Assembly (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 853-011802-001 — Upper Electrode Assembly (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

853-011802-001 Specifications and Compatible Tools

Key specs: 1,600W RF power handling, 13.56MHz frequency, 2.5kV max voltage, and -5°C to 150°C operating temp range. Compatible with Lam 2300 Versys models P1–P5 (2008–2015 production). Exclusion: 2300 Versys MXE (Rev. C) systems using part 853-011802-002—installing this part will cause RF arcing due to mismatched impedance profiles. Verify tool’s RF bias generator model (LAM-3200B or LAM-3200C) before purchase.

What to Check Before Buying a Used 853-011802-001 in 2026

Ceramic layer thickness: Use a laser profilometer; reject if <0.8mm.
RF connector resistance: Measure with a multimeter; >0.1Ω indicates degraded contacts.
Cooling channel blockage: Pressure-test at 10psi for 5 minutes; >10% flow loss invalidates part.
Surface cracks: Inspect under UV light; any cracks >0.2mm require replacement.
Service history: Reject parts not replaced in the last 5 years (per Lam’s 7-year lifecycle policy).

FAQ

Q: Is used 853-011802-001 reliable for high-volume production?
A: Yes, if ceramic thickness and cooling channels meet thresholds. Refurbished units are recommended for 24/7 operations.

Q: Does 853-011802-001 fit 2300 Versys MXE tools?
A: No. MXE variants require 853-011802-002.

Q: How to test electrode uniformity?
A: Use a plasma uniformity scanner (e.g., LAM-UPS-300) at 1,000W; deviation >±8% requires recalibration.

Q: Used vs. refurbished: which is better?
A: Refurbished includes new cooling channels and recalibration. Used parts require in-house testing.