853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research)

Name: 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research)
Brand: Lam Research
SKU: 853-034218-001
Price: 354000 USD
Availability: InStock

Part No. 853-034218-001

Market Price

→ Stable

$301K–$407K

Typical secondary market pricing · USD

Low $301,000Avg $354,000High $407,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $301K – $407K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) cost in 2026?

A used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) from Lam Research typically sells for $301k – $407k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 853-034218-001 Cost in 2026?

In 2026, used units of 853-034218-001 range from $301,000–$407,000, with refurbished versions priced at $370,000–$407,000. Used pricing drops 15–20% compared to 2025 due to oversupply from decommissioned Kiyo systems. Refurbished units include Lam-certified quartz resurfacing and RF testing but exclude OEM warranty. Savings against new OEM pricing (approx. $700,000–$750,000) hit 50–70%.

Caveat: Units with >40,000 RF-hours often show micro-cracking and require $20k–$30k in repairs. Always verify RF-cycle logs. Refurbished parts with <20,000 post-refurb hours are preferred for high-dose plasma processes.

853-034218-001 Specifications and Compatible Tools

Key specs: 300mm diameter quartz liner, rated for 1,200°C continuous operation, 13.56MHz RF coupling. Designed for 2300 Kiyo chambers with plasma power up to 4kW.

Compatible tools:

Lam 2300 Kiyo (all revisions 2008–2022)
Lam Kiyo45 (rev A–C, 2015–2020)

Compatibility warning: Do not install in systems using 853-034218-002 (Kiyo55-specific revision). Mismatched liners cause arcing and wafer defects. Cross-check chamber serial numbers against Lam’s 2020 compatibility matrix.

What to Check Before Buying a Used 853-034218-001 in 2026

Pitting depth: Use a digital micrometer to measure pitting. Reject units with >50µm pits (per Lam spec 2300-ETCH-004).
Quartz purity: Confirm SiO₂ >99.9% via spectrometer. Units with <99.8% purity show accelerated erosion.
RF-hour threshold: Units with >40,000 RF-hours require requalification. Check Lam’s RF-cycle log format (2018–2026).
Surface roughness: Use a profilometer. Reject if Ra >0.5µm (spec: ≤0.3µm).
Installation date: Liners installed pre-2020 often have degraded edge seals. Verify with chamber maintenance logs.

**Q: Is 853-034218-00