853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research)

Name: 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research)
Brand: Lam Research
SKU: 853-034218-001

Part No. 853-034218-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) cost in 2026?

Pricing for used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 853-034218-001 — Quartz Liner, 300mm (2300 Kiyo Etch) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

853-034218-001 Specifications and Compatible Tools

Key specs: 300mm diameter quartz liner, rated for 1,200°C continuous operation, 13.56MHz RF coupling. Designed for 2300 Kiyo chambers with plasma power up to 4kW.

Compatible tools:

Lam 2300 Kiyo (all revisions 2008–2022)
Lam Kiyo45 (rev A–C, 2015–2020)

Compatibility warning: Do not install in systems using 853-034218-002 (Kiyo55-specific revision). Mismatched liners cause arcing and wafer defects. Cross-check chamber serial numbers against Lam’s 2020 compatibility matrix.

What to Check Before Buying a Used 853-034218-001 in 2026

Pitting depth: Use a digital micrometer to measure pitting. Reject units with >50µm pits (per Lam spec 2300-ETCH-004).
Quartz purity: Confirm SiO₂ >99.9% via spectrometer. Units with <99.8% purity show accelerated erosion.
RF-hour threshold: Units with >40,000 RF-hours require requalification. Check Lam’s RF-cycle log format (2018–2026).
Surface roughness: Use a profilometer. Reject if Ra >0.5µm (spec: ≤0.3µm).
Installation date: Liners installed pre-2020 often have degraded edge seals. Verify with chamber maintenance logs.