853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research)

Name: 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research)
Brand: Lam Research
SKU: 853-066912-001

Part No. 853-066912-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) cost in 2026?

Pricing for used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

853-066912-001 Specifications and Compatible Tools

The 853-066912-001 is a 300mm yttria-coated confinement ring designed for Lam 2300 Kiyo etch tools (manufactured 2015–2020). Key specs include RF power handling up to 4,000W at 13.56MHz and a 0.5–2.5mTorr pressure range. Compatible models include the Lam 2300 Kiyo (all revs) and Lam 2300 Flex (rev 2.0+). Avoid using this part in tools requiring the 853-066912-002 variant, which has a modified RF coupling geometry. Cross-check the 10-digit serial number on the ring’s base to confirm compatibility.

What to Check Before Buying a Used 853-066912-001 in 2026

Coating thickness: Use a profilometer to verify yttria coating ≥50 microns. Reject parts below 40 microns.
RF resistance: Test with a vector network analyzer (VNA) for continuity <0.5 ohms. Values >1.0 ohms indicate arcing risk.
Etch uniformity: Run a 2026 Lam-standard test wafer; uniformity must exceed 95% across the 300mm surface.
Lifecycle: Units over 8 years old (pre-2018 manufacture) are high-risk due to Lam’s 2026 material fatigue studies.
Crack inspection: Use UV light and dye penetrant to detect microfractures in the ceramic body.

FAQ

Q: Is 853-066912-001 better than the 853-066912-002?
A: No. The 002 variant has a revised RF coupling design for newer Kiyo tools (rev 3.0+). Use the correct part for your tool.

Q: How does 2026 pricing compare to 2025?
A: Prices stabilized in 2026 due to increased used supply.

Q: Can I install this on a 200mm tool?
A: No. The 300mm ring is incompatible with 200mm systems. Use 853-066910-001 for 200mm Kiyo tools.

Q: What if my tool shows arcing after installation?
A: Verify RF resistance with a VNA. If >0.5 ohms, replace the ring. Arcing often indicates a degraded coating or poor grounding.