853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research)

Name: 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research)
Brand: Lam Research
SKU: 853-066912-001
Availability: InStock

Part No. 853-066912-001

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Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) cost in 2026?

Pricing for used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Lam Research Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 853-066912-001 — Confinement Ring, 300mm (Kiyo Etch) (Lam Research) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 853-066912-001 Cost in 2026?

In 2026, used 853-066912-001 units typically range from $15,000 to $20,000, while refurbished models with re-coating and RF testing cost $25,000–$30,000. New OEM pricing remains above $50,000, making used/refurbished options 50–70% cheaper. Units with >40,000 RF-hours may command a 10–15% premium due to higher wear risk. Refurbished parts include yttria reapplication (50–70 microns) and RF continuity checks, while used parts require buyer verification of coating integrity. Prices fluctuate based on Lam’s 2026 supply chain dynamics and semiconductor industry demand. Always confirm 2026 pricing with a parts broker before purchase.

853-066912-001 Specifications and Compatible Tools

The 853-066912-001 is a 300mm yttria-coated confinement ring designed for Lam 2300 Kiyo etch tools (manufactured 2015–2020). Key specs include RF power handling up to 4,000W at 13.56MHz and a 0.5–2.5mTorr pressure range. Compatible models include the Lam 2300 Kiyo (all revs) and Lam 2300 Flex (rev 2.0+). Avoid using this part in tools requiring the 853-066912-002 variant, which has a modified RF coupling geometry. Cross-check the 10-digit serial number on the ring’s base to confirm compatibility.

What to Check Before Buying a Used 853-066912-001 in 2026

Coating thickness: Use a profilometer to verify yttria coating ≥50 microns. Reject parts below 40 microns.
RF resistance: Test with a vector network analyzer (VNA) for continuity <0.5 ohms. Values >1.0 ohms indicate arcing risk.
Etch uniformity: Run a 2026 Lam-standard test wafer; uniformity must exceed 95% across the 300mm surface.
Lifecycle: Units over 8 years old (pre-2018 manufacture) are high-risk due to Lam’s 2026 material fatigue studies.
Crack inspection: Use UV light and dye penetrant to detect microfractures in the ceramic body.

FAQ

Q: Is 853-066912-001 better than the 853-066912-002?
A: No. The 002 variant has a revised RF coupling design for newer Kiyo tools (rev 3.0+). Use the correct part for your tool.

Q: How does 2026 pricing compare to 2025?
A: Prices stabilized in 2026 due to increased used supply. Refurbished units dropped ~$2,000 from 2025 highs.

Q: Can I install this on a 200mm tool?
A: No. The 300mm ring is incompatible with 200mm systems. Use 853-066910-001 for 200mm Kiyo tools.

Q: What if my tool shows arcing after installation?
A: Verify RF resistance with a VNA. If >0.5 ohms, replace the ring. Arcing often indicates a degraded coating or poor grounding.