Lam Kiyo Etch Chamber Parts & Kits

Name: Lam Kiyo Etch Chamber Parts & Kits
Brand: Lam Research

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Kiyo Etch Chamber Parts & Kits moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Kiyo Etch Chamber Parts & Kits cost in 2026?

Pricing for used Lam Kiyo Etch Chamber Parts & Kits units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Kiyo Etch Chamber Parts & Kits from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Kiyo Etch Chamber Parts & Kits Specifications and Compatible Tools

Key specs: Power rating 1.2–3.5 kW, voltage 208V/480V, frequency 13.56 MHz, max pressure 1 × 10⁻⁵ Torr. Compatible with Lam 2300 Versys (2005–2012), Kiyo 5500 (2008–2015), and Alliance 550 (2010–2014). Exclusion warning: Do not install part #2300-88910 on Kiyo 5500 models with 2013+ serial numbers—updated port designs require modified mounting brackets (see Lam TPS-550-RevC).

What to Check Before Buying a Used Lam Kiyo Etch Chamber Parts & Kits in 2026

Pitting depth: Use a micrometer to measure wall erosion; reject parts with >50 µm loss in critical zones (per Lam SR-2300-04).
Insulation resistance: Test with a megohmmeter; values <10 GΩ indicate dielectric failure risk.
O-ring groove dimensions: Verify with a digital caliper (tolerance ±0.05 mm; Lam spec #550-008).
Production date: Avoid chambers made pre-2018 without FFKM seals—check laser-etched serial numbers.
Leak test: Perform helium mass spectrometry at 1 × 10⁻⁶ mbar·l/s; higher rates invalidate vacuum integrity.

FAQ

Q: Are used Lam Kiyo parts interchangeable with 2300 Versys tools?
A: Yes, if the part’s revision code matches (e.g., Rev B–Rev D for 2300 Versys 2008–2010). Cross-reference Lam’s CCR-2300-012 matrix.

Q: Used vs refurbished—what’s the difference?
A: Used parts are resold as-is; refurbished units include FFKM seal replacement, plasma coil reflow, and full diagnostics (certified to 2026 spec).

Q: How long do etch chamber parts last after refurbishment?
A: 18–24 months in high-cycling environments (50+ cycles/week); 3+ years in low-use scenarios.