Lam Research
Lam Kiyo Etch Chamber Parts & Kits
Lam Research
Lam Kiyo Etch Chamber Parts & Kits
Market Price
→ Stable$300–$10K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Lam Kiyo Etch Chamber Parts & Kits
Price history and market activity data is being compiled.
How much does a used Lam Kiyo Etch Chamber Parts & Kits cost in 2026?
A used Lam Kiyo Etch Chamber Parts & Kits from Lam Research typically sells for $300 – $10k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Kiyo Etch Chamber Parts & Kits from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Kiyo Etch Chamber Parts & Kits Cost in 2026?
Used parts range from $300–$2,500, while refurbished kits cost $1,500–$7,000. New OEM equivalents average $10,000–$25,000, offering 40–70% savings with used/refurbished options. Caveat: Parts produced before 2020 often use obsolete seal materials (e.g., FKM instead of FFKM), requiring $200–$500 in additional gasket replacements during installation. Always verify chamber production year against Lam’s 2018 material spec update.
Lam Kiyo Etch Chamber Parts & Kits Specifications and Compatible Tools
Key specs: Power rating 1.2–3.5 kW, voltage 208V/480V, frequency 13.56 MHz, max pressure 1 × 10⁻⁵ Torr. Compatible with Lam 2300 Versys (2005–2012), Kiyo 5500 (2008–2015), and Alliance 550 (2010–2014). Exclusion warning: Do not install part #2300-88910 on Kiyo 5500 models with 2013+ serial numbers—updated port designs require modified mounting brackets (see Lam TPS-550-RevC).
What to Check Before Buying a Used Lam Kiyo Etch Chamber Parts & Kits in 2026
- Pitting depth: Use a micrometer to measure wall erosion; reject parts with >50 µm loss in critical zones (per Lam SR-2300-04).
- Insulation resistance: Test with a megohmmeter; values <10 GΩ indicate dielectric failure risk.
- O-ring groove dimensions: Verify with a digital caliper (tolerance ±0.05 mm; Lam spec #550-008).
- Production date: Avoid chambers made pre-2018 without FFKM seals—check laser-etched serial numbers.
- Leak test: Perform helium mass spectrometry at 1 × 10⁻⁶ mbar·l/s; higher rates invalidate vacuum integrity.
FAQ
Q: Are used Lam Kiyo parts interchangeable with 2300 Versys tools?
A: Yes, if the part’s revision code matches (e.g., Rev B–Rev D for 2300 Versys 2008–2010). Cross-reference Lam’s CCR-2300-012 matrix.
Q: Used vs refurbished—what’s the difference?
A: Used parts are resold as-is; refurbished units include FFKM seal replacement, plasma coil reflow, and full diagnostics (certified to 2026 spec).
Q: How long do etch chamber parts last after refurbishment?
A: 18–24 months in high-cycling environments (50+ cycles/week); 3+ years in low-use scenarios.
Q: Can I retrofit a Kiyo 5500 with a 2300 Versys chamber?
Recent Market Listings
Updated May 19$255
As-is$3,210
Used$7,090
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $255 | As-is | May 12, 2026 |
| Ask | $3,210 | Used | May 5, 2026 |
| Ask | $7,090 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $300 – $10K
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