Lam Research 02-266793-00 ESC Pedestal Assembly, N2 Cool, IVA DHCM

Name: Lam Research 02-266793-00 ESC Pedestal Assembly, N2 Cool, IVA DHCM
Brand: Lam Research
SKU: 02-266793-00
Availability: InStock

Part No. 02-266793-00

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 02-266793-00 ESC Pedestal Assembly, N2 Cool, IVA DHCM cost in 2026?

Pricing for used Lam Research 02-266793-00 ESC Pedestal Assembly, N2 Cool, IVA DHCM units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Electrostatic Chucks vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 02-266793-00 ESC Pedestal Assembly, N2 Cool, IVA DHCM from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 02-266793-00 ESC Pedestal Assembly Cost in 2026?

Used units range from $18,000 to $28,000 in 2026, depending on thermal cycling history and wafer lot count. Refurbished variants (with replaced DHCM and cooling lines) start at $32,000. This represents 40–60% savings versus new OEM pricing (which exceeds $75,000). Key caveat: units with >15,000 cumulative thermal cycles or >50,000 wafer lots processed typically require DHCM replacement, adding $8,000–$12,000 to total cost. Always verify chamber-specific modifications (e.g., gas porting revisions) before purchase.

Lam Research 02-266793-00 Specifications and Compatible Tools

Power: 3.2 kW max, 24V DC, 20 kHz frequency
Cooling: Nitrogen backside (flow rate: 1.2–1.8 SLPM)
Temperature Range: -50°C to 350°C (±2°C stability)
Compatible Tools:
- Lam Centura DSi eChamber (2008–2014 production)
- Lam Producer P5000 Etch (2010–2015 models)
- Lam Symphony i5 (2012–2016 variants)
  Incompatibility Warning: Do not install on tools using part number 02-266793-01 (oxygen-cooled variant); incorrect gas routing will damage the DHCM.

What to Check Before Buying a Used Lam Research 02-266793-00 in 2026

Thermal Cycling History: Reject units with >15,000 cycles (log via Lam’s PartLife™ tracker).
Electrical Continuity: Use a multimeter to measure chuck electrode resistance; >10 ohms indicates delamination (reject).
Cooling Line Integrity: Pressure-test N2 lines at 50 psi for 24 hours; >2% leakage means replacement.
DHCM Firmware: Verify version 3.2 or higher (pre-2013 firmware lacks modern temperature profiling).
Wafer Lot Count: Units with >60,0