Lam Research 540-00584-000 CVD SiC Showerhead, 33cm OD

Name: Lam Research 540-00584-000 CVD SiC Showerhead, 33cm OD
Brand: Lam Research
SKU: 540-00584-000
Price: 166 USD
Availability: InStock

Part No. 540-00584-000

Market Price

→ Stable

From $166

Typical secondary market pricing · USD

Low $166Avg $166High $166

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-10

Request Quote · $166 – $166

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 540-00584-000 CVD SiC Showerhead, 33cm OD cost in 2026?

A used Lam Research 540-00584-000 CVD SiC Showerhead, 33cm OD from Lam Research typically sells for $166 – $166 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 540-00584-000 CVD SiC Showerhead, 33cm OD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 540-00584-000 Cost in 2026?

Used units of the 540-00584-000 are priced at $166 (fixed rate on secondary markets). Refurbished variants are unavailable due to low demand for full-function units—this part is nearly always sold as components-only. New OEM units (discontinued in 2018) historically ranged from $3,200–$3,800, offering ~95% savings by opting for used. Caveat: Parts-only listings exclude internal gas distribution plates (PN 540-00584-003), which must be sourced separately if needed. Demand remains niche, with <5 units transacting globally in 2026 Q2.

Lam Research 540-00584-000 Specifications and Compatible Tools

This 33cm OD SiC showerhead operates at 208V 3-phase, 60Hz, with a rated gas flow of 1.5–2.5 SLPM (NF₃/PH₃ mixes). Constructed from reaction-bonded SiC, it withstands temperatures up to 450°C. Compatible with: