✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Lam Research

Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly

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Lam Research

Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly

Part No. 666-068437-003

Market Price

→ Stable

$270–$358

Typical secondary market pricing · USD

Low $270Avg $314High $358

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $270 – $358

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly cost in 2026?

A used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly from Lam Research typically sells for $270 – $358 on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Sensors & Instrumentation vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

This is a fluoroptic contact temperature sensor assembly used to measure wafer or chuck surface temperatures during etch processing. Fluoroptic sensors use fiber-optic probes to read temperature without electrical interference, making them well-suited for RF-intensive plasma environments. This part is used across Lam etch platforms and sourced from decommissioned or surplus tool builds.

Observed Market Pricing

Observed asking prices for 666-068437-003 range from $270 to $358 across 3 listings we track.

Condition	Observed price	Source	Observed
pre-owned	$270	eBay	2026-07-15
pre-owned	$270	secondary-market listing	2026-07-15
Used	$358	ebay	Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 666-068437-003: used, pre-owned. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect the fiber-optic probe tip and connector for physical damage or contamination, as fluoroptic sensors are sensitive to probe condition and can give drifted readings if the tip is degraded. Confirm the assembly is complete and the connector mates correctly with your controller before installation.

Frequently Asked Questions

Q: How much does Lam Research 666-068437-003 cost? A: Observed market asking prices run $270 to $358 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Q: Which tools does 666-068437-003 fit? A: The specific tool compatibility for this part is not identified in the available description. Compatibility should be confirmed by matching part number 666-068437-003 against your tool's BOM, and we verify fit before quoting.

Q: What condition options are available for 666-068437-003? A: We've seen this P/N offered as: used, pre-owned. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 666-068437-003? A: Use the quote form on this page — the part number 666-068437-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30

AskSep 23, 2026

$230

As-is

AskSep 16, 2026

$296

Used

AskSep 9, 2026

$332

Refurbished

Type	Price	Condition	Date
Ask	$230	As-is	Sep 23, 2026
Ask	$296	Used	Sep 16, 2026
Ask	$332	Refurbished	Sep 9, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 666-068437-003 cost?

Observed market asking prices run $270 to $358 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Which tools does 666-068437-003 fit?

The specific tool compatibility for this part is not identified in the available description. Compatibility should be confirmed by matching part number 666-068437-003 against your tool's BOM, and we verify fit before quoting.

What condition options are available for 666-068437-003?

We've seen this P/N offered as: used, pre-owned. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 666-068437-003?

Use the quote form on this page — the part number 666-068437-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.