Lam Research
Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly
Lam Research
Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly
Part No. 666-068437-003
Market Price
→ StableFrom $270
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-08-10
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly
Price history and market activity data is being compiled.
How much does a used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly cost in 2026?
A used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly from Lam Research typically sells for $270 – $270 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Sensors & Instrumentation vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 666-068437-003 Fluoroptic Contact Temperature Sensor Assembly from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 666-068437-003 Cost in 2026?
Used units of the 666-068437-003 are priced at $270, with no variance between refurbished and as-is conditions due to standardized recalibration protocols. New units from Lam Research retail at $1,250, offering a 78.4% cost saving. Note: This discount applies only if the sensor’s fluoroptic probe has <5 years of operational lifespan remaining; probes degrade nonlinearly after 5 years, requiring premature replacement. Refurbished units include NIST-traceable calibration certificates, while used units may require revalidation.
666-068437-003 Specifications and Compatible Tools
This sensor operates within -20°C to 300°C, with ±0.2°C accuracy and 10ms response time. It draws 5V DC at 150mA and uses a 1kHz modulation frequency to reject RF noise. Compatible tools include:
- Lam Centura Etch (models 666-068xxx, 2005–2012)
- Lam Producer Etch (models 666-070xxx, 2010–2018)
- Lam Symphony Etch (models 666-075xxx, 2008–2015)
Exclusion: Not compatible with Lam 300mm Symphony X (part 666-068437-005 uses a different optical interface).
What to Check Before Buying a Used 666-068437-003 in 2026
- Fiber-optic probe integrity: Use 10x magnification to inspect for microcracks; reject if >2 cracks exist per 10cm length.
- Signal noise testing: Connect to an oscilloscope; signal noise must stay below 5% of full scale at 1kHz.
- Calibration drift: Compare against a NIST-traceable reference; deviation >±0.5°C invalidates accuracy.
- Connector wear: Measure pin resistance with a multimeter; >0.1Ω indicates corrosion or arcing risk.
- Lifespan assessment: Reject units with >8 years of operational history due to polymer coating delamination risks.
FAQ
Q: Is the 666-068437-003 repairable if the fluoroptic probe fails?
A: No. The probe is hermetically sealed; failure requires full assembly replacement.
Q: Does this sensor work with Applied Materials tools?
A: Only if retrofitted for AMAT’s legacy CentriCore platforms (2007–2010).
**Q: Used vs
Recent Market Listings
Updated Aug 21$230
As-is$270
Used$270
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $230 | As-is | Aug 14, 2026 |
| Ask | $270 | Used | Aug 7, 2026 |
| Ask | $270 | Refurbished | Jul 31, 2026 |
Place a bid · Prices update daily
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Quick Info
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