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Lam Research

Lam Research 713-100254-002 Upper Electrode Clamp, PEEK

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Lam Research

Lam Research 713-100254-002 Upper Electrode Clamp, PEEK

Part No. 713-100254-002

Market Price

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 713-100254-002 Upper Electrode Clamp, PEEK cost in 2026?

Pricing for used Lam Research 713-100254-002 Upper Electrode Clamp, PEEK units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 713-100254-002 Upper Electrode Clamp, PEEK from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 713-100254-002 Cost in 2026?

Used units range from $1,200–$2,500, depending on revision (Rev B or C) and surface integrity. Refurbished variants with PEEK recertification cost $1,800–$3,000. New OEM pricing exceeds $5,000, offering 40–65% savings with used/refurbished options. Note: Parts with >5% PEEK surface degradation (cracks, pits) are excluded from the lower end of the used range. Market tightness varies by region—North America sees 20% higher premiums for Rev C clamps due to Centura tool retrofits.

713-100254-002 Specifications and Compatible Tools

Constructed from PEEK, this clamp operates at max 260°C and 1,500V DC. Dimensions: 150mm OD × 50mm thickness. Compatible with Lam Research Centura platforms (models 8200, 8220, 8240) produced 2010–2015. Also fits Applied Materials’ Reflexion Etch systems (models 5500, 6500) with adapter plate 713-100254-005. Exclusion: Do not install on Lam’s 8280 series (2016+) without modifying the electrode stack (see 713-100254-008 for updated geometry).

What to Check Before Buying a Used 713-100254-002 in 2026

  1. PEEK integrity: Use a 10X loupe to inspect for microcracks. Reject parts with >3 surface flaws per 10cm².
  2. Thickness tolerance: Measure with a 0.001mm-accurate micrometer. Deviation >0.2mm from 50.0mm spec indicates wear.
  3. Dielectric test: Apply 1,000V DC with a megohmmeter. Resistance <1×10¹² Ω fails isolation requirements.
  4. Service history: Verify cycles via tool logs. Clamps >50,000 cycles risk electrode misalignment.

Recent Market Listings

Updated Aug 21

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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