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Lam Research

Lam Research 715-009777-002 Cap Electrode

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Lam Research

Lam Research 715-009777-002 Cap Electrode

Part No. 715-009777-002

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

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How much does a used Lam Research 715-009777-002 Cap Electrode cost in 2026?

Pricing for used Lam Research 715-009777-002 Cap Electrode units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-009777-002 Cap Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 715-009777-002 Cap Electrode Cost in 2026?

Used units range from $1,200–$2,800 in 2026, depending on erosion depth and surface finish. Refurbished variants (with plasma-facing recoating) add $400–$600. New OEM parts cost $5,500–$6,200. Buyers save 70–80% by opting for used, but only if the electrode’s erosion remains below 0.5mm (measured via micrometer on the ceramic substrate). Exceeding this threshold forces downgrading to a lower-grade replacement.

Lam Research 715-009777-002 Specifications and Compatible Tools

This cap electrode operates at 13.56MHz RF frequency, 3kV DC bias, and 400W max power. Dimensions: 150mm OD × 25mm thick, with a 715-0097-77-002 ceramic-to-aluminum bond. Compatible with Lam Centura 5500 (1998–2003), Producer 5000 (2001–2006), and Symphony Etch (2004–2008) platforms. Warning: Do not install on tools using 715-009777-003 (2010+ models)—the RF coupling geometry differs by 0.2mm, causing arcing.

What to Check Before Buying a Used Lam Research 715-009777-002 Cap Electrode in 2026

  1. Erosion depth: Use a digital micrometer to confirm substrate wear <0.5mm; >0.7mm invalidates part.
  2. Insulation resistance: Test with a megohmmeter at 500V DC; <10GΩ indicates dielectric failure.
  3. Crack inspection: UV light (365nm) reveals microfractures in ceramic; reject any with >2mm cracks.
  4. Dimensional fit: Verify ID/OD tolerances (±0.1mm) with calipers; mismatched parts risk RF leakage.
  5. Service history: Avoid units with >15 process cycles (per Lam’s 20-cycle replacement guideline).

FAQ

Q: Is used 715-009777-002 reliable for high-density plasma tools?
A: Yes, if erosion <0.5mm and insulation resistance >10GΩ. Refurbished units with plasma-sprayed Al₂O₃ coating are preferred for >3kW applications.

Q: Will 715-009777-002 fit a Lam Centura 5500?
A: Yes, but verify the tool’s RF matching network is calibrated for 13.56MHz (Centura 5500 pre-2002 models require a 715

Recent Market Listings

Updated Aug 21

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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