Lam Research 715-011531-002 Anodized Aluminum Electrode

Name: Lam Research 715-011531-002 Anodized Aluminum Electrode
Brand: Lam Research
SKU: 715-011531-002
Availability: InStock

Part No. 715-011531-002

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Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 715-011531-002 Anodized Aluminum Electrode cost in 2026?

Pricing for used Lam Research 715-011531-002 Anodized Aluminum Electrode units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-011531-002 Anodized Aluminum Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 715-011531-002 Cost in 2026?

Used units range from $1,200 to $2,500, depending on anodized layer integrity and prior deployment in high-density plasma tools. Refurbished variants (with certified 0.0015"-thick anodization and <5% surface pitting) cost $3,000–$4,500. These prices save 40–60% vs new OEM pricing (~$6,000–$7,500). Critical caveat: parts with <0.001" anodized thickness after 3+ years in a 13.56 MHz etch chamber show 2–3× higher plasma arcing risk. Always verify anodization specs via cross-sectional microscopy before purchase.

Lam Research 715-011531-002 Specifications and Compatible Tools

This electrode operates at 1200V DC max, 13.56 MHz RF, with a 6.5" diameter and 0.375" thickness. Anodization hardness: 450–550 HV. Compatible with Lam Centura 8200 Series (2010–2018) and 8900 Series (2015–2022) etch chambers. Exclusion: Do not install in Lam 8900-2200 models (2019+) without a 715-011531-003 adapter plate—mismatched RF coupling causes 15–20% power loss. Cross-check tool’s plasma generator model (e.g., P3000 vs P5000) to confirm voltage compatibility.

What to Check Before Buying a Used Lam Research 715-011531-002 in 2026

Anodized layer thickness: Use a beta gauge; reject parts <0.0012".
Surface cracks: Inspect with 10× loupe; >3 cracks/mm² indicates plasma fatigue.
Electrical continuity: Test with a megohmmeter; resistance must exceed 10¹² Ω.
Deployment history: Avoid parts from tools with >10,000 process cycles—check the chamber’s cycle log.
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