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Lam Research

Lam Research 715-011531-104 Aluminum Anodized Electrode

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Lam Research

Lam Research 715-011531-104 Aluminum Anodized Electrode

Part No. 715-011531-104

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

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How much does a used Lam Research 715-011531-104 Aluminum Anodized Electrode cost in 2026?

Pricing for used Lam Research 715-011531-104 Aluminum Anodized Electrode units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-011531-104 Aluminum Anodized Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 715-011531-104 Cost in 2026?

Used units typically range from $2,200 to $4,800 in 2026, with refurbished variants priced 15–20% higher. New OEM parts exceed $8,500, making used options 55–70% cheaper. Price variance hinges on anodized layer integrity—electrodes with thickness below 0.001" (vs. spec of 0.0015–0.002") lose 30%+ value. Always verify plasma-facing surface condition via profilometry before purchase.

Lam Research 715-011531-104 Specifications and Compatible Tools

This electrode operates at 1,200V max, 500W, with a 15.5" diameter and 0.25" thickness. Compatible with Lam Centura® platforms (models 8200/8300, 1998–2005) and Flex® etch systems (models 9400/9600, 2001–2008). Excludes Lam 715-011531-105 (nickel-plated variant)—using this part in a -105 setup risks arcing and chamber damage. Cross-check with your BOM for tool-specific voltage tolerances.

What to Check Before Buying a Used Lam Research 715-011531-104 in 2026

  1. Anodized layer thickness: Use a digital micrometer to confirm ≥0.0015". Below 0.001" indicates excessive plasma wear.
  2. Flatness: Measure with a 12" steel straightedge and dial gauge. Deviation >0.002" causes uneven field distribution.
  3. Electrical continuity: Test with a multimeter—resistance must be <0.1 ohms between mounting tabs.
  4. Service history: Reject parts with >10k cumulative process hours or use beyond 2018 (anodize degradation accelerates post-15-year lifecycle).

FAQ

Q: Is 715-011531-104 used or refurbished better?
A: Refurbished units (re-anodized per Lam spec) last 30–50% longer than used, but cost 25% more.

Q: Does this electrode fit Lam 8200 Centura® etch?
A: Yes, but confirm your chamber’s voltage rating (must be ≤1,200V).

Q: How to test for plasma pitting?
A: Use a 10X magnifier and LED light at 45°—pits >0.0005" deep require replacement.

**Q: 715-011531

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Updated Aug 21

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Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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