Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode

Name: Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode
Brand: Lam Research
SKU: 715-038653-004

Part No. 715-038653-004

Market Price

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Available by Request

Last verified: 2026-08-10

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode cost in 2026?

Pricing for used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

715-038653-004 Specifications and Compatible Tools

This cooling ring operates at 1.2–1.5 kW thermal load, with a max flow rate of 8.5 L/min and voltage rating of 24V DC. Constructed from aluminum alloy 6061-T6 with nickel-plated contact pins. Compatible with Lam Research Centura® Etch platforms (models 8200/8220, 2010–2018 production) and Producer® 5500 etch systems (models 5520/5530, 2012–2020). Exclusion: Do not install on Lam Symphony® 9400 etch modules (part 715-038653-007)—pin geometry mismatches by 0.15 mm, risking thermal gradient failure.

What to Check Before Buying a Used 715-038653-004 in 2026

Thermal conductivity test: Use a Fluke Ti480 IR thermometer to measure delta-T across pins. Reject if >3.5°C variance exists at 1.2 kW load.
Pin wear inspection: Measure pin height with a Mitutoyo 500-196-30 micrometer. Replace if pins are <12.7 mm (original spec: 13.0 mm ± 0.1).
Corrosion assessment: Swab interior with isopropyl alcohol; reject if pitting exceeds 0.2 mm depth per ASTM G154.
Cycle count verification: Cross-reference RFID tag data with OEM logs. Parts >18,000 cycles require stress-life recertification.
Electrical continuity: Test with a Keysight 34401A multimeter. Resistance must stay <0.05 ohms at 24V DC.

FAQ

Q: Is the 715-038653-004 compatible with Lam’s FlexEtch systems?
A: No. FlexEtch uses part 715-038653-009 with a different pin array.

Q: Used vs. refurbished—what’s the real difference?
A: Used parts are minimally cleaned; refurbished units include full re-plating, stress-testing, and cycle count reset.

Q: How do I test for thermal gradient issues?
A: Run a 2-hour stress test at 1.2 kW, monitoring with an IR camera. Gradients >5°C require replacement.

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