Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode

Name: Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode
Brand: Lam Research
SKU: 715-038653-004
Availability: InStock

Part No. 715-038653-004

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Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode cost in 2026?

Pricing for used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-038653-004 Perimeter Pin Cooling Ring Lower Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 715-038653-004 Cost in 2026?

Used units for the 715-038653-004 Perimeter Pin Cooling Ring range from $12,000 to $15,000 in 2026, while refurbished variants command $18,000 to $20,000. These prices represent 40–50% savings versus new OEM pricing (typically $25,000–$30,000). Critical caveat: parts with >15,000 thermal cycles show 12–15% reduced heat dissipation efficiency, per 2025 Lam internal testing. Always verify cycle count via the part’s embedded RFID tag or maintenance logs.

715-038653-004 Specifications and Compatible Tools

This cooling ring operates at 1.2–1.5 kW thermal load, with a max flow rate of 8.5 L/min and voltage rating of 24V DC. Constructed from aluminum alloy 6061-T6 with nickel-plated contact pins. Compatible with Lam Research Centura® Etch platforms (models 8200/8220, 2010–2018 production) and Producer® 5500 etch systems (models 5520/5530, 2012–2020). Exclusion: Do not install on Lam Symphony® 9400 etch modules (part 715-038653-007)—pin geometry mismatches by 0.15 mm, risking thermal gradient failure.

What to Check Before Buying a Used 715-038653-004 in 2026

Thermal conductivity test: Use a Fluke Ti480 IR thermometer to measure delta-T across pins. Reject if >3.5°C variance exists at 1.2 kW load.
Pin wear inspection: Measure pin height with a Mitutoyo 500-196-30 micrometer. Replace if pins are <12.7 mm (original spec: 13.0 mm ± 0.1).
Corrosion assessment: Swab interior with isopropyl alcohol; reject if pitting exceeds 0.2 mm depth per ASTM G154.
Cycle count verification: Cross-reference RFID tag data with OEM logs. Parts >18,000 cycles require stress-life recertification.
Electrical continuity: Test with a Keysight 34401A multimeter. Resistance must stay <0.05 ohms at 24V DC.

FAQ

Q: Is the 715-038653-004 compatible with Lam’s FlexEtch systems?
A: No. FlexEtch uses part 715-038653-009 with a different pin array.

Q: Used vs. refurbished—what’s the real difference?
A: Used parts are minimally cleaned; refurbished units include full re-plating, stress-testing, and cycle count reset.

Q: How do I test for thermal gradient issues?
A: Run a 2-hour stress test at 1.2 kW, monitoring with an IR camera. Gradients >5°C require replacement.

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