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Lam Research

Lam Research 715-443130-001 Exelan Focus Ring (Refurbished)

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Lam Research

Lam Research 715-443130-001 Exelan Focus Ring (Refurbished)

Part No. 715-443130-001

Market Price

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 715-443130-001 Exelan Focus Ring (Refurbished) cost in 2026?

Pricing for used Lam Research 715-443130-001 Exelan Focus Ring (Refurbished) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 715-443130-001 Exelan Focus Ring (Refurbished) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 715-443130-001 Cost in 2026?

Refurbished units for the Exelan etch system range from $8,500 to $12,000 in 2026, depending on cycle history and surface condition. New OEM parts exceed $22,000, offering 50–65% savings with the used/refurbished option. Caveat: Parts with >15,000 plasma cycles (common in 2018–2022 production runs) may require discounted pricing due to accelerated erosion risks. Always request cycle logs and plasma uniformity test results before purchase.

715-443130-001 Specifications and Compatible Tools

This quartz focus ring operates at 200V DC, 13.56 MHz with a thermal tolerance of -50°C to 300°C. Dimensions: 200mm outer diameter, 150mm inner diameter, 10mm thickness. Compatible with Lam Exelan EX5200 (2005–2012) and EX5500 (2008–2015). Not compatible with EX5700 models due to chuck geometry differences (Lam P/N 715-443130-002 required). Verify tool serial numbers against Lam’s 2009 revision guide to confirm fit.

What to Check Before Buying a Used 715-443130-001 in 2026

  1. Surface erosion: Use a 10X magnifier to inspect for pitting >50µm deep; reject if present.
  2. Dimensional drift: Measure OD/ID with digital calipers; tolerance must be

Recent Market Listings

Updated Aug 21

No recent market activity for Lam Research 715-443130-001 Exelan Focus Ring (Refurbished).

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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