Caladan CertifiedExport Compliant30-Day WarrantyEscrow Protected

Lam Research

Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

No photo

Lam Research

Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

Part No. 716-003688-188

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →
Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

Coming Soon for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC cost in 2026?

Pricing for used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-003688-188 Cost in 2026?

Used units for 716-003688-188 (200mm JEIDA ESC focus ring shield insert) range from $1,200 to $1,800 in 2026, while refurbished versions cost $2,500 to $3,000. New parts from Lam Research exceed $6,500, offering 40–60% savings with used/refurbished options. Note: Parts from tools decommissioned before 2015 often show >15% material thinning due to plasma erosion, reducing effective lifespan by 30–50%. Always verify service history for plasma exposure hours.

716-003688-188 Specifications and Compatible Tools

This shield insert operates at –150°C to 300°C, with a max RF frequency of 13.56 MHz and voltage rating of 2 kV DC. Dimensions: Ø200mm OD × 45mm height, constructed from ceramic-coated aluminum for plasma stability. Compatible with:

  • Lam Plasmaline 700i (2008–2012)
  • Lam Centura 720i (2010–2015)
  • Lam Delta 730i (2013–2017, excluding 730i-CE models with 716-003688-189).
    Warning: Do not install on tools using 716-003688-189 (thread pitch mismatch; 0.8mm vs 1.0mm).

What to Check Before Buying a Used 716-003688-188 in 2026

  1. Crack inspection: Use 5× magnification to check for radial fractures >0.1mm in ceramic coating.
  2. Dimensional tolerance: Measure OD with a 0.01mm-resolution caliper; reject parts deviating >±0.05mm.
  3. Insulation test: Apply 500V DC with a megohmmeter; resistance must exceed 10¹² ohms.
  4. Surface finish: Profile with a 3D scanner; Ra (roughness average) must be <0.8μm.
  5. Service history: Verify plasma exposure <15,000 hours (tools >10 years old often exceed this).

FAQ

Q: Does 716-003688-188 fit all Lam etch tools with 200mm JEIDA ESC?
A: No. Incompatible with 730i-CE and later models using 71

Recent Market Listings

Updated Aug 21

No recent market activity for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC.

Submit a bid to get notified when sellers list this part.

Place a bid →

Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

Get a Quote

Response within 4 hours. Export compliance handled.

Email parts@caladansemi.com

Or call us during business hours

Secondary Market

Place a Bid or Ask

Connect with verified buyers and sellers for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC.

Want to Buy
Want to Sell

All transactions are export compliant · Escrow available · parts@caladansemi.com