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Lam Research

Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

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Lam Research

Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

Part No. 716-003688-188

Market Price

→ Stable

$547

One observed secondary-market listing · USD

Low $547Avg $547High $547

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $547 (one observed listing)

Talk to a specialist · parts@caladansemi.com

Request a quote for P/N 716-003688-188Response within 4 hours

✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Market Data

Coming Soon for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC

Price history and market activity data is being compiled.

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How much does a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC cost in 2026?

One observed secondary-market listing for a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC from Lam Research: $547 (2026). A single observation is not a market range. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

This is a shield insert for the focus ring assembly on a 200mm JEIDA-style electrostatic chuck, used in Lam Research etch chambers. It sits around the wafer edge to shape the plasma boundary and protect surrounding chamber components. It is used across Lam etch platforms configured with 200mm JEIDA ESC tooling.

Observed Market Pricing

We have 1 observed listing for 716-003688-188 at $547.

Condition Observed price Source Observed
New – Open box $547 ebay Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 716-003688-188: new – open box. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect shield inserts for plasma erosion, cracking, and dimensional wear along the inner edge, as uneven erosion can affect etch uniformity and wafer edge performance.

Frequently Asked Questions

Q: How much does Lam Research 716-003688-188 cost? A: We've observed 716-003688-188 listed at $547. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Q: Which tools does 716-003688-188 fit? A: The description specifies a 200mm JEIDA ESC configuration, but exact tool compatibility should be confirmed by cross-referencing this part number against your tool's BOM. We verify fit before quoting.

Q: What condition options are available for 716-003688-188? A: We've seen this P/N offered as: new – open box. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 716-003688-188? A: Use the quote form on this page — the part number 716-003688-188 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30
AskSep 23, 2026

$465

As-is
AskSep 16, 2026

$547

Used
AskSep 9, 2026

$547

Refurbished

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 716-003688-188 cost?

We've observed 716-003688-188 listed at $547. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Which tools does 716-003688-188 fit?

The description specifies a 200mm JEIDA ESC configuration, but exact tool compatibility should be confirmed by cross-referencing this part number against your tool's BOM. We verify fit before quoting.

What condition options are available for 716-003688-188?

We've seen this P/N offered as: new – open box. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 716-003688-188?

Use the quote form on this page — the part number 716-003688-188 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts

Get a Quote

Market: $547 (one observed listing)

Response within 4 hours. Export compliance handled.

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Secondary Market

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