Lam Research
Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC
Lam Research
Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC
Part No. 716-003688-188
Market Price
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Request Quote →Last verified: 2026-08-10
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Market Data
Coming Soon for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC
Price history and market activity data is being compiled.
How much does a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC cost in 2026?
Pricing for used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 716-003688-188 Cost in 2026?
Used units for 716-003688-188 (200mm JEIDA ESC focus ring shield insert) range from $1,200 to $1,800 in 2026, while refurbished versions cost $2,500 to $3,000. New parts from Lam Research exceed $6,500, offering 40–60% savings with used/refurbished options. Note: Parts from tools decommissioned before 2015 often show >15% material thinning due to plasma erosion, reducing effective lifespan by 30–50%. Always verify service history for plasma exposure hours.
716-003688-188 Specifications and Compatible Tools
This shield insert operates at –150°C to 300°C, with a max RF frequency of 13.56 MHz and voltage rating of 2 kV DC. Dimensions: Ø200mm OD × 45mm height, constructed from ceramic-coated aluminum for plasma stability. Compatible with:
- Lam Plasmaline 700i (2008–2012)
- Lam Centura 720i (2010–2015)
- Lam Delta 730i (2013–2017, excluding 730i-CE models with 716-003688-189).
Warning: Do not install on tools using 716-003688-189 (thread pitch mismatch; 0.8mm vs 1.0mm).
What to Check Before Buying a Used 716-003688-188 in 2026
- Crack inspection: Use 5× magnification to check for radial fractures >0.1mm in ceramic coating.
- Dimensional tolerance: Measure OD with a 0.01mm-resolution caliper; reject parts deviating >±0.05mm.
- Insulation test: Apply 500V DC with a megohmmeter; resistance must exceed 10¹² ohms.
- Surface finish: Profile with a 3D scanner; Ra (roughness average) must be <0.8μm.
- Service history: Verify plasma exposure <15,000 hours (tools >10 years old often exceed this).
FAQ
Q: Does 716-003688-188 fit all Lam etch tools with 200mm JEIDA ESC?
A: No. Incompatible with 730i-CE and later models using 71
Recent Market Listings
Updated Aug 21No recent market activity for Lam Research 716-003688-188 Focus Ring Shield Insert, 200mm JEIDA ESC.
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