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Lam Research

Lam Research 716-011830-008 Alumina Focus Ring, Wafer Clamp

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Lam Research

Lam Research 716-011830-008 Alumina Focus Ring, Wafer Clamp

Part No. 716-011830-008

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

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How much does a used Lam Research 716-011830-008 Alumina Focus Ring, Wafer Clamp cost in 2026?

Pricing for used Lam Research 716-011830-008 Alumina Focus Ring, Wafer Clamp units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-011830-008 Alumina Focus Ring, Wafer Clamp from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-011830-008 Cost in 2026?

Used units for 716-011830-008 alumina focus rings typically range from $1,200–$1,800 in 2026, while refurbished variants (with ceramic resurfacing) cost $2,500–$3,000. New OEM parts exceed $6,500, offering ~75% savings with used options. Critical caveat: erosion depth above 0.1mm on the wafer contact surface correlates with plasma uniformity degradation >15%, invalidating process specs. Always verify part history—units from tools with >1,200 process cycles show 3x higher failure rates in edge plasma stability tests.

716-011830-008 Specifications and Compatible Tools

This alumina (99.5% Al₂O₃) focus ring operates at 1.5kV max, 500W RF power, and 13.56MHz frequency. Dimensions: OD 280mm, ID 200mm, thickness 15mm. Compatible with Lam Research Centura platforms (models 8200/8220, 2008–2015), PRODUCER 5000 series (models 5500/5700, 2010–2017), and Symphony 9400 (2012–2020). Exclusion: Do not install on Lam 7900 platforms (part 716-011830-009)—incompatible clamping force profile causes microcracking. Cross-check tool’s RF matching network specs; mismatched impedance (>50Ω) risks arcing.

What to Check Before Buying a Used 716-011830-008 in 2026

  1. Erosion depth: Use a digital micrometer to measure wafer-contact surface. Reject if erosion exceeds 0.12mm (spec limit).
  2. Dielectric strength: Apply 2kV AC for 1 minute using a megohmmeter. Leakage >10µA invalidates insulation integrity.
  3. Crack propagation: Inspect under UV light for microcracks. Any flaw >0.2mm length fails due to plasma arcing risk.
  4. Surface finish: Profile with a 3D stylus instrument. Ra >1.6µm indicates excessive wear, degrading plasma uniformity.
  5. Cycle count: Request tool logs. Avoid parts with >1,500 etch cycles—edge wear rates accelerate 40% post-threshold.

FAQ

Q: Is 716-011830-008 compatible with Lam Symphony 9450?
A: Yes

Recent Market Listings

Updated Aug 21

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Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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